2014 9th International Conference on Industrial and Information Systems (ICIIS) 2014
DOI: 10.1109/iciinfs.2014.7036497
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A low cost polyimide based metal oxide film RH sensor

Abstract: A simple flexible metal oxide (γ-Al 2 O 3 ) film based parallel plate capacitive humidity sensor has been fabricated by sol-gel method on UPILEX-S polyimide substrate for measuring relative humidity (RH). The important features of the sensor are easy to fabricate, no shorting problem, highly flexible, bulk producible and can be integrated with signal conditioning unit. The characteristics of the sensor have been studied with humidity in the range of 5 to 85 % RH. The measured sensitivity of the sensor is 4.044… Show more

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Cited by 2 publications
(2 citation statements)
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References 15 publications
(24 reference statements)
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“…Moreover, the testing setups used in the previous attempts achieved narrower humidity range. As for the sensors sensitivity, the results of the current work outperform the previous efforts mentioned in [11][12][13][14][15]. This is primarily due to the fact that Nafion is well known for its hydrophilicity, which enhances the sensor's sensitivity due to the PET substrate.…”
Section: Resultsmentioning
confidence: 61%
See 1 more Smart Citation
“…Moreover, the testing setups used in the previous attempts achieved narrower humidity range. As for the sensors sensitivity, the results of the current work outperform the previous efforts mentioned in [11][12][13][14][15]. This is primarily due to the fact that Nafion is well known for its hydrophilicity, which enhances the sensor's sensitivity due to the PET substrate.…”
Section: Resultsmentioning
confidence: 61%
“…PET is a plastic organic film used extensively for its flexibility and low cost. Previous efforts on flexible substrates were demonstrated [11][12][13][14][15] with different fabrications processes (Lithography, Inkjet-printing). This paper introduces laser engraving for fabricating transducers.…”
Section: Introductionmentioning
confidence: 99%