“…Typically, an optical sensor techniques based on laser displacement meter (LDM) can be divided into the following types: time-of-flight [1,2,3,4], triangulation [5,6], frequency modulation continuous-wave (FMCW) phase measurement [7,8], phase shift [9,10,11,12,13,14], interferometry method [15,16,17,18,19] and others [20,21,22]. Among these types, interferometry method is well-known for providing the highest resolution [15,16,17,18,19].…”