A linear air bearing stage with active magnetic preloads for ultraprecise straight motion

Ro, Seung-Kook; Kim, Soohyun; Kwak, Yoon Keun; Park, Chun Hong

doi:10.1016/j.precisioneng.2009.06.010

Cited by 40 publications

(18 citation statements)

References 15 publications

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“…Electromagnetically preloaded aerostatic guiding systems eliminate the load dependence of the air cushion and improve the system's compliance substantially [5]. Guiding systems exclusively based on controlled electromagnets supersede most of the mentioned drawbacks [6].…”

Section: …10mentioning

confidence: 99%

Investigation on the Dynamic Behaviour of an Ultrasonic-Levitation Magnetic Guiding System

Reiners

Denkena

2016

AMR

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Abstract. Guiding systems for precision manufacturing machines have to fulfil high demands. Low compliance and the absence of friction is required to achieve a high production accuracy. This article presents a novel active guiding system based on the combination of ultrasonic levitation and magnetic actuators. Firstly, the combined actuator and its working principles are described. Subsequently, the concept for an active, frictionless and medium-free guiding system is outlined. In addition to the free degree of freedom (DOF) in guiding direction, the other 5 DOF are adjustable in order to improve the guides positioning accuracy. The experimental validation of the concept is conducted with a simplified prototype, acting as a 3 DOF adjustable planar guide. Finally, measured compliance frequency responses demonstrate the performance of this novel active guiding concept.

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Section: …10mentioning

confidence: 99%

Investigation on the Dynamic Behaviour of an Ultrasonic-Levitation Magnetic Guiding System

Reiners

Denkena

2016

AMR

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“…Therefore, it is necessary to apply a suitable preloading method for avoiding these problems. There are some preloading methods; a weight load, a vacuum load, an electrostatic load, and a magnetic load in contactless preloading methods (Ro, et al, 2010). Although a preloading method using weight load can apply large force, it makes a response of the system low.…”

Section: Proposed Magnetically Preloaded Aerostatic Guideway 21 Concmentioning

confidence: 99%

Magnetically preloaded aerostatic guideway for high speed nanometer positioning

Tsumura

Yoshioka

Shinno

et al. 2014

JAMDSM

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Demands for nanometer positioning with a high resolution and a long stroke have increased in a variety of industries. Performance of guide elements is one of the most important issues for realizing such positioning systems. In general, an ultra-precision positioning system has aerostatic guideway which can restrain a moving table without non-linear behavior, i.e., friction and backlash. Characteristics of aerostatic guideway affect the performance of the positioning system. This study is aiming at developing an aerostatic guideway which can achieve a high speed nanometer positioning. The aerostatic guideway preloaded by magnetic attraction force can lead to provide a compact structure, and the characteristics can be easily controlled without increased driving force. However, the relative velocity between permanent magnets and the attracted surface causes the induced eddy current, which deteriorates the performance during high speed positioning. In this study, in order to minimize the eddy current loss, the magnetic attraction force is successfully added to a mechanism following the positioning table. In order to evaluate the proposed structure, a positioning system is developed by using the magnetic attraction force preloaded aerostatic guideway. The positioning system is constructed by a positioning table and a following table. Basic characteristics of the aerostatic guideway are experimentally evaluated. From the results, the magnetic attraction force-preloaded guideway can be designed so as to obtain high stiffness. By optimizing the magnetic force, the performance of the positioning system was evaluated. The experimental results of frequency response confirm that the response of the positioning system can be improved by applying magnetic attraction force. In addition, the results of stepwise positioning confirm that the proposed positioning system has high positioning resolution. These results confirm that the proposed guideway achieves high speed nanometer positioning capability.

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“…Automatic control systems (Mechatronics systems) are getting popularity over decades [27][28][29][30]. The current research shows a mechatronics prototype.…”

Section: Introductionmentioning

confidence: 99%

A New Type of Aerostatic Thrust Bearing Controlled by High-speed Pneumatic Valve and a Novel Pressure Transducer

Rehman

Guiyun

Wang

et al. 2019

IJAME

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The current research work presents a low cost, efficient and innovative active aerostatic thrust bearing which is controlled through a combination of the Arduino board, feedback transducers and high-speed valves. The purpose is to make low cost, compact active aerostatic thrust bearing with overall small dimensions and compact size. A prototype design is done in solid works with small dimensions and components are produced with the help of the high precision machining process. There are two high-speed electropneumatic valves which are controlled through pulse width modulation techniques. These high-speed electro-pneumatic valves modify the supply pressure of aerostatic bearing to achieve desired air height gap. There are two novel pressure sensors which provide a feedback signal for control. The test bench to perform experiments has been explained. The performance of the proposed aerostatic bearing is checked both in open loop and closed loop configuration with respect to static and dynamic conditions.

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A linear air bearing stage with active magnetic preloads for ultraprecise straight motion

Cited by 40 publications

References 15 publications

Investigation on the Dynamic Behaviour of an Ultrasonic-Levitation Magnetic Guiding System

Investigation on the Dynamic Behaviour of an Ultrasonic-Levitation Magnetic Guiding System

Magnetically preloaded aerostatic guideway for high speed nanometer positioning

A New Type of Aerostatic Thrust Bearing Controlled by High-speed Pneumatic Valve and a Novel Pressure Transducer

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