A lateral comb-drive structure for energy scavenging

Nounou, A.; Ragaie, H.F.

doi:10.1109/iceec.2004.1374528

Cited by 8 publications

(4 citation statements)

References 4 publications

(3 reference statements)

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“…As for power generation, this device can produce up to 20 μW/cm 2 [ 4 ]. The potential generation for this type of electrostatic microgenerator has been shown through simulation to be upwards of 10 μW of power, driven at 120 Hz, under a 3.5 m/s 2 acceleration [ 43 ]. However, due to the design of the comb drives involved off-axis actuation can cause rotation, which promotes electrical contact, shorting, and stiction, as shown in Figure 2 .…”

Section: Methods Of Micro-generationmentioning

confidence: 99%

MEMS-Based Power Generation Techniques for Implantable Biosensing Applications

Lueke

Moussa

2011

Sensors

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Implantable biosensing is attractive for both medical monitoring and diagnostic applications. It is possible to monitor phenomena such as physical loads on joints or implants, vital signs, or osseointegration in vivo and in real time. Microelectromechanical (MEMS)-based generation techniques can allow for the autonomous operation of implantable biosensors by generating electrical power to replace or supplement existing battery-based power systems. By supplementing existing battery-based power systems for implantable biosensors, the operational lifetime of the sensor is increased. In addition, the potential for a greater amount of available power allows additional components to be added to the biosensing module, such as computational and wireless and components, improving functionality and performance of the biosensor. Photovoltaic, thermovoltaic, micro fuel cell, electrostatic, electromagnetic, and piezoelectric based generation schemes are evaluated in this paper for applicability for implantable biosensing. MEMS-based generation techniques that harvest ambient energy, such as vibration, are much better suited for implantable biosensing applications than fuel-based approaches, producing up to milliwatts of electrical power. High power density MEMS-based approaches, such as piezoelectric and electromagnetic schemes, allow for supplemental and replacement power schemes for biosensing applications to improve device capabilities and performance. In addition, this may allow for the biosensor to be further miniaturized, reducing the need for relatively large batteries with respect to device size. This would cause the implanted biosensor to be less invasive, increasing the quality of care received by the patient.

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Section: Methods Of Micro-generationmentioning

confidence: 99%

MEMS-Based Power Generation Techniques for Implantable Biosensing Applications

Lueke

Moussa

2011

Sensors

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“…This leads to a change of the electric potential through the capacitor. These converters are characterized by their limited output power and the most developed ones are designed for high working frequencies [26][27][28][29][30][31][32][33].…”

Section: Overview Of Vibration Energy Convertersmentioning

confidence: 99%

“…They reach maximally only some micro watts at low frequencies. [26][27][28][29][30][31][32][33], piezoelectric [34][35][36][37][38][39][40][41][42][43][44][45] and magnetoelectric [46][47][48][49][50][51][52][53] vibration transducers prototypes.…”

Section: Overview Of Vibration Energy Convertersmentioning

confidence: 99%

Survey of electromagnetic and magnetoelectric vibration energy harvesters for low frequency excitation

et al. 2017

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“…Vibration is one of the most common environmental energy sources for scavenging because of its availability. In the literature, vibration-based scavengers using mainly three different techniques have been introduced: electrostatic (capacitive) [2][3][4][5][6][7][8][9], piezoelectric [10][11][12][13][14][15][16][17] and electromagnetic (inductive) . In most of the comparative studies, it has been stated that electromagnetic generators are better suited for medium-scale applications, whereas piezoelectric generators for microscale applications [1,13,14,26,27].…”

Section: Introductionmentioning

confidence: 99%

An electromagnetic micro energy harvester based on an array of parylene cantilevers

Sari

Balkan

Külah

2009

J. Micromech. Microeng.

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This paper presents the design, optimization and implementation of an electromagnetic type vibration-to-electrical micro energy harvester. The proposed harvester implements a new design employing array of parylene cantilevers on which planar gold coils are fabricated. The micro harvester generates voltage by virtue of the relative motion between the coils and a stationary magnet. The coils are connected electrically in series to sum up the voltage output from individual cantilevers. The number of cantilevers can be adjusted to improve the generated power without significantly increasing the overall device volume. Another forthcoming feature of this study is the investigation of the phase-shift phenomenon, which is the effect of natural frequency mismatches between the cantilevers due to fabrication related nonuniformities. A detailed mathematical modeling and optimization of the design for various cases, together with the phase and frequency shifts between the cantilevers, are carried out. The proposed harvester is implemented on a microscale and mathematical modeling is verified through extensive tests. The fabricated device occupies a volume of 9.5 × 8 × 6 mm 3 . A single cantilever of this device can generate a maximum voltage and power of 0.67 mV and 56 pW, respectively, at a vibration frequency of 3.4 kHz. These values can be improved considerably by increasing the coil turns and natural frequency of the cantilevers. However, our test results show that any mismatch between the series cantilevers results in significant degradation of the overall output.

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A lateral comb-drive structure for energy scavenging

Cited by 8 publications

References 4 publications

MEMS-Based Power Generation Techniques for Implantable Biosensing Applications

MEMS-Based Power Generation Techniques for Implantable Biosensing Applications

Survey of electromagnetic and magnetoelectric vibration energy harvesters for low frequency excitation

An electromagnetic micro energy harvester based on an array of parylene cantilevers

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