A large thrust trans-scale precision positioning stage based on the inertial stick–slip driving

Zhong, Bowen; Zhu, Jie; Zeng, Jin; He, Huan; Wang, Zhenhua; Sun, Lining

doi:10.1007/s00542-018-04286-y

Cited by 17 publications

(13 citation statements)

References 15 publications

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“…(f). FHMs-PSSA with compact structure by Zhong et al (2019b). (g) FHMs-PSSA with compact structure by Shao et al (2019a).…”

Section: Progress In Structural Design Of Fhms-pssasmentioning

confidence: 99%

“…There were also some FHMs-PSSAs designed with compact structures (Oubellil et al, 2019; Qin et al, 2019c; Tian et al, 2019), which achieved large horizontal thrust or load capacity by introducing the flexure hinge mechanisms. For example, as shown in Figure 4(f), Zhong et al (2019b) proposed an FHMs-PSSA; the volume was 30 × 17 × 17.5 mm 3 ; the vertical and horizontal load capacities were 6.1 and 25 N, respectively; the maximum speed was 12 mm/s, and the resolution reached 5 nm. As shown in Figure 4(g), Shao et al designed a compact cylindrical FHMs-PSSA; the flexure hinge mechanism is the main supporting frame structure of the piezoelectric stack and pre-tightening unit; the volume, the maximum thrust, and the holding force of the actuator are Φ 9 ×27 mm 2 , 3.65, and 9.8 N, respectively.…”

Section: Progress In Structural Design Of Fhms-pssasmentioning

confidence: 99%

“…Additionally, the two superposed sines waveform and sine waveform usually excite the actuators for driving in the resonance state to improve the output power (Bansevicius and Blechertas, 2008;Chu et al, 2016;Lee et al, 2007;Nishimura et al, 2012;Pan et al, 2019;Suzuki et al, 2012;Yu et al, 2020). In many studies, the waveforms were introduced buffer stages at the rising or falling edge (Fan et al, 2019;Liu et al, 2019a;Qin et al, 2019c;Tang et al, 2020;Tian et al, 2019;Wang and Lu, 2012;Yang et al, 2019Yang et al, , 2020bZhong et al, 2019aZhong et al, , 2019bZhong et al, , 2020Zhu et al, 2018), see Figure 2(h); the works of Wang et al and Zhong et al stated that the waveforms introduced the buffer stages got better driving performance, including step displacement and speed, which are presented in Table 1. This is owing to the creep characteristics of piezoelectric transducers, and a proper buffer stage is helpful to make them elongate more fully and contract more effectively, so the waveform with buffer stage is often used in practical applications as well.…”

Section: Brief Introduction Of the Excitation Signalmentioning

confidence: 99%

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Piezoelectric stick-slip actuators with flexure hinge mechanisms: A review

Qiao

et al. 2022

Journal of Intelligent Material Systems and Structures

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Piezoelectric stick-slip actuators (PSSAs) are famous for ultimate working condition adaptability, simple structure, and positioning accuracy. To meet the demand of industrial application, lots of PSSAs designed with flexure hinge mechanisms (FHMs-PSSAs) have been developed to realize the requirements of translational motion, rotational motion, multi-degree-of-freedom (multi-DOF) motion. The output performance of the FHMs-PSSAs has been greatly improved, including load capacity, speed, and accuracy; moreover, some approaches to solve the problem of the backward motion are provided as well. In this work, the working principle of FHMs-PSSAs is introduced, and the excitation signals applicable to FHMs-PSSAs are summarized. Based on the current research and development status, the progress of structure design of FHMs-PSSAs is introduced in accordance with translatory FHMs-PSSAs, rotary FHMs-PSSAs, and multi-DOF FHMs-PSSAs. Additionally, the developed analysis methods and design schemes to improve the performance are introduced, including theoretical analysis methods, consistency scheme of forward and reverse performance, suppression scheme of the backward motion, and improvement scheme of positioning accuracy. The significance of this work can be regarded as a further supplement to the previous review articles on the PSSAs, which will provide a reference and guidance for the future development of FHMs-PSSAs.

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“…(f). FHMs-PSSA with compact structure by Zhong et al (2019b). (g) FHMs-PSSA with compact structure by Shao et al (2019a).…”

Section: Progress In Structural Design Of Fhms-pssasmentioning

confidence: 99%

Section: Progress In Structural Design Of Fhms-pssasmentioning

confidence: 99%

Section: Brief Introduction Of the Excitation Signalmentioning

confidence: 99%

See 1 more Smart Citation

Piezoelectric stick-slip actuators with flexure hinge mechanisms: A review

Qiao

et al. 2022

Journal of Intelligent Material Systems and Structures

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“…Various types of self-propelled robots have employed different principles and structures. Typical types of motion principles include stick–slip [ 19 , 20 , 21 , 22 ], centrifugal force [ 23 ], USM [ 24 , 25 ], and inchworm [ 26 ]. Figure 1 shows a comparison of the representative micromanipulation robots and the XY stage [ 22 , 24 , 27 ].…”

Section: Introductionmentioning

confidence: 99%

Precise Position Control of Holonomic Inchworm Robot Using Four Optical Encoders

et al. 2023

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In this study, an XYθ position sensor is designed/proposed to realize the precise control of the XYθ position of a holonomic inchworm robot in the centimeter to submicrometer range using four optical encoders. The sensor was designed to be sufficiently compact for mounting on a centimeter-sized robot for closed-loop control. To simultaneously measure the XYθ displacements, we designed an integrated two-degrees-of-freedom scale for the four encoders. We also derived a calibration equation to decrease the crosstalk errors among the XYθ axes. To investigate the feasibility of this approach, we placed the scale as a measurement target for a holonomic robot. We demonstrated closed-loop sequence control of a star-shaped trajectory for multiple-step motion in the centimeter to micrometer range. We also demonstrated simultaneous three-axis proportional–integral–derivative control for one-step motion in the micrometer to sub-micrometer range. The close-up trajectories were examined to determine the detailed behavior with sub-micrometer and sub-millidegree resolutions in the MHz measurement cycle. This study is an important step toward wide-range flexible control of precise holonomic robots for various applications in which multiple tools work precisely within the limited space of instruments and microscopes.

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“…Zhang et al realized the high speed of the piezoelectric stick-slip actuator by increasing the driving frequency [31], [32]. Zhong et al developed an inertial stick-slip driving platform in combination with a flexible hinge mechanism [33]. Zhang et al studied an anisotropic friction surface to reduce the backward motion [34].…”

Section: Introductionmentioning

confidence: 99%

A Linear Piezoelectric Stick-Slip Actuator via Triangular Displacement Amplification Mechanism

Gao

et al. 2020

IEEE Access

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In the field of piezoelectric actuators, high speed piezoelectric stick-slip actuators have received considerable attention. A linear stick-slip piezoelectric actuator is proposed in this article, which combines asymmetric flexure hinge with triangular displacement amplification mechanism. The designed linear piezoelectric stick-slip actuator can achieve high speed at lower frequency. The configuration of the actuator and driving principle are illustrated and designed by theory and simulation. In order to study its performance, a prototype is fabricated, and an experimental system is established. The experimental results confirm that the maximum step efficiency of the prototype is 97.9 %. The maximum speed is 20.17 mm/s under the driving voltage of 100 V P−P , the driving frequency of 610 Hz and the locking force of 2.5 N. The maximum load capacity is 2.4 N under the locking force of 3.5 N. The proposed piezoelectric stick-slip actuator increases the step efficiency and improves the output speed at lower frequency. INDEX TERMS High speed, stick-slip actuators, asymmetric flexure hinge, triangular displacement amplification mechanism.

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A large thrust trans-scale precision positioning stage based on the inertial stick–slip driving

Cited by 17 publications

References 15 publications

Piezoelectric stick-slip actuators with flexure hinge mechanisms: A review

Piezoelectric stick-slip actuators with flexure hinge mechanisms: A review

Precise Position Control of Holonomic Inchworm Robot Using Four Optical Encoders

A Linear Piezoelectric Stick-Slip Actuator via Triangular Displacement Amplification Mechanism

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