Abstract:Nano-electromechanical (NEM) contact switches have been extensively studied to suppress the limitations of conventional complementary metal-oxide-semiconductor (CMOS) transistors. The attributes of NEM contact switches includes reduced power consumption, reduced off-state leakage current, increased on-state current and sub-thermal switching. However, unacceptably high pull-in voltage and low contact lifetime posed a significant challenge for the use of NEM contact switches in energy efficient CMOS applications… Show more
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