A large area reconfigurable MOEMS microshutter array for coded aperture imaging systems

McNie, Mark E.; King, D.O.; Price, Nicola; Combes, David J.; Smith, Graeme C.; Brown, Alan; Gordon, Neil T.; Stone, Steven M.; Brunson, K.M.; Lewis, Keith L.; Slinger, Christopher W.; Rogers, Stanley

doi:10.1117/12.794996

Cited by 5 publications

(4 citation statements)

References 9 publications

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“…For the individual addressing of n × m MMA, since the high density of micromirrors did not allow the individual connection of each electrode, a linecolumn addressing scheme, which decreased the number of connections from n × m to n + m, was applied. Using this scheme, the individual addressing of an n × m MMA was achieved, allowing the individual actuation of micromirrors, as in other previously reported MEMS arrays [15][16][17].…”

Section: Individual Addressingmentioning

confidence: 96%

The two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy

Canonica¹,

Zamkotsian²,

Lanzoni³

et al. 2013

J. Micromech. Microeng.

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In multi-object spectrometers, field selectors, which are located in the focal plane of the telescopes, are required for the selection of astronomical objects, such as stars or faint galaxies. We present a two-dimensional micromirror array as a field selector. Object selection is achieved through the precise tilting of micromirrors, which reflect the light of objects toward the spectrometer. These arrays were composed of 2048 (32 × 64) electrostatically actuated silicon micromirrors that measured 100 × 200 μm 2 . The micromirrors were addressed either by lines or individually using a line-column addressing scheme. The fabrication process of these devices involved three wafers and two wafer-level bondings. Characterization, by white light interferometry, revealed a tilt angle of 25 • at a voltage of 121 V, and a coated micromirror deformation below 10 nm. A fill factor of 82% and a contrast of 1000:1 were also observed. Demonstration of the line-column addressing scheme was achieved through its application to a sub-array of 2 × 2 micromirrors.

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Section: Individual Addressingmentioning

confidence: 96%

The two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy

Canonica¹,

Zamkotsian²,

Lanzoni³

et al. 2013

J. Micromech. Microeng.

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“…Previously reported work [15][16][17][18] focused on realising a scalable architecture for multi-chip mask in the mid-IR based on polysilicon micro-opto-electro-mechanical systems (MOEMS) technology and its integration with ASIC drive electronics. The mask uses interference effects to modulate incident light -achieved by tuning a large array of asymmetric Fabry-Perot optical cavities via an applied voltage that is controlled using a hysteretic row/column addressing scheme.…”

Section: Introductionmentioning

confidence: 99%

Establishing a MOEMS process to realise microshutters for coded aperture imaging applications

et al. 2011

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Coded aperture imaging has been used for astronomical applications for several years. Typical implementations used a fixed mask pattern and are designed to operate in the X-Ray or gamma ray bands. Recently applications have emerged in the visible and infra red bands for low cost lens-less imaging systems and system studies have shown that considerable advantages in image resolution may accrue from the use of multiple different images of the same scene -requiring a reconfigurable mask. Previously reported work focused on realising such a mask to operate in the mid-IR band based on polysilicon micro-optoelectro-mechanical systems (MOEMS) technology and its integration with ASIC drive electronics using a tiled approach to scale to large format masks. The MOEMS chips employ interference effects to modulate incident light -achieved by tuning a large array of asymmetric Fabry-Perot optical cavities via an applied voltage using row/column addressing.In this paper we report on establishing the manufacturing process for such MOEMS microshutter chips in a commercial MEMS foundry, MEMSCAP -including the associated challenges in moving the technology out of the development laboratory into manufacturing. Small scale (7.3 x 7.3mm) and full size (22 x 22mm) MOEMS chips have been produced that are equivalent to those produced at QinetiQ. Optical and electrical testing has shown that these are suitable for integration into large format reconfigurable masks for coded aperture imaging applications.

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“…Previously reported work [12][13][14] focused on realising a 2x2cm single chip mask in the mid-IR based on polysilicon micro-opto-electro-mechanical systems (MOEMS) technology and its integration with ASIC drive electronics using conventional wire bonding. The mask uses interference effects to modulate incident light -achieved by tuning a large array of asymmetric Fabry-Perot optical cavities via an applied voltage that may be set to hysteretic row/column scheme for addressing.…”

Section: Introductionmentioning

confidence: 99%

A 2x2 multi-chip reconfigurable MOEMS mask: a stepping stone to large format microshutter arrays for coded aperture applications

et al. 2010

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Coded aperture imaging has been used for astronomical applications for several years. Typical implementations used a fixed mask pattern and are designed to operate in the X-Ray or gamma ray bands. Recently applications have emerged in the visible and infra red bands for low cost lens-less imaging systems and system studies have shown that considerable advantages in image resolution may accrue from the use of multiple different images of the same scene -requiring a reconfigurable mask.Previously reported work focused on realising a 2x2cm single chip mask in the mid-IR based on polysilicon micro-optoelectro-mechanical systems (MOEMS) technology and its integration with ASIC drive electronics using conventional wire bonding. It employs interference effects to modulate incident light -achieved by tuning a large array of asymmetric Fabry-Perot optical cavities via an applied voltage and uses a hysteretic row/column scheme for addressing.In this paper we report on the latest results in the mid-IR for the single chip reconfigurable MOEMS mask, trials in scaling up to a mask based on a 2x2 multi-chip array and report on progress towards realising a large format mask comprising 44 MOEMS chips. We also explore the potential of such large, transmissive IR spatial light modulator arrays for other applications and in the current and alternative architectures.

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A large area reconfigurable MOEMS microshutter array for coded aperture imaging systems

Cited by 5 publications

References 9 publications

The two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy

The two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy

Establishing a MOEMS process to realise microshutters for coded aperture imaging applications

A 2x2 multi-chip reconfigurable MOEMS mask: a stepping stone to large format microshutter arrays for coded aperture applications

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