2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems &Amp; Eurosensors XXXIII (TRANSDUCERS &Am 2019
DOI: 10.1109/transducers.2019.8808463
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A Jumping Silicon Microrobot with Electrostatic Inchworm Motors and Energy Storing Substrate Springs

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Cited by 14 publications
(11 citation statements)
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“…They have emerged to expand the exploration and micromanipulation potentials beyond human and macro robots’ capabilities and have been utilized in a wide range of applications in various scientific disciplines. For instance, several researchers have demonstrated the aptitude of microbots for the navigation of confined spaces and hazardous environments, [ 3–10 ] searching underneath obstacles after natural disasters, [ 4,5,7,10–12 ] and for environmental inspection and monitoring. [ 3,4,8,11,13 ] Additional interesting applications of microbotics include the picking and placing of micro‐sized objects, [ 14–16 ] micro‐assembly, [ 4,17,18 ] and micro‐manipulation.…”
Section: Introductionmentioning
confidence: 99%
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“…They have emerged to expand the exploration and micromanipulation potentials beyond human and macro robots’ capabilities and have been utilized in a wide range of applications in various scientific disciplines. For instance, several researchers have demonstrated the aptitude of microbots for the navigation of confined spaces and hazardous environments, [ 3–10 ] searching underneath obstacles after natural disasters, [ 4,5,7,10–12 ] and for environmental inspection and monitoring. [ 3,4,8,11,13 ] Additional interesting applications of microbotics include the picking and placing of micro‐sized objects, [ 14–16 ] micro‐assembly, [ 4,17,18 ] and micro‐manipulation.…”
Section: Introductionmentioning
confidence: 99%
“…For instance, several researchers have demonstrated the aptitude of microbots for the navigation of confined spaces and hazardous environments, [ 3–10 ] searching underneath obstacles after natural disasters, [ 4,5,7,10–12 ] and for environmental inspection and monitoring. [ 3,4,8,11,13 ] Additional interesting applications of microbotics include the picking and placing of micro‐sized objects, [ 14–16 ] micro‐assembly, [ 4,17,18 ] and micro‐manipulation. [ 4,16,18,19 ] Microbots have also attracted significant attention in the field of biomedical engineering, [ 20 ] where they have been employed in vivo for treatments, [ 21,22 ] drug delivery, [ 22–25 ] during noninvasive micro‐surgeries [ 17,19,22–24 ] to deliver cargo such as stem cells, and to sample tissues in inaccessible locations.…”
Section: Introductionmentioning
confidence: 99%
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“…In this work, we leverage recent approaches in modelling small LaMSA jumpers as well as the resulting insights from this modelling [7,9,30]. We focus on spring-actuated jumpers in particular, as this is one of the most common strategies for implementing small jumping robots [17][18][19][20][21][22][23][24]29,31,32]. Most importantly, we will take advantage of our improved understanding of how latches in these spring actuated systems can be used to mediate the transition of stored potential energy to kinetic energy in the jumper [9,30].…”
Section: Introductionmentioning
confidence: 99%
“…The first step is to select a suitable driving mechanism. In this work we rely on electrostatic attractive forces, because electrostatic forces scale proportional to area and are thus well suited to millimeter-sized devices (Schindler et al, 2019; Trimmer, 1989). The second step in the hierarchical design involves patterning individual electrode layers into power-dense arrays.…”
Section: Introductionmentioning
confidence: 99%