A hybrid Monte Carlo/fluid model of RF plasmas in a SiH/sub 4//H/sub 2/ mixture

Sato, Noriyosi; Tagashira, Hiroaki

doi:10.1109/27.106803

Cited by 54 publications

(30 citation statements)

References 29 publications

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“…20 Details of the electron collisional processes considered in our model are included in Table I and cross sections taken from Ohmori, Shimozuma, and Tagashira. 21 Our set is a reduced version of that used by Date, 20 Sato and Tagashira, 19 and Kushner 18 but the essential steady-state features of the discharge are in agreement with our previous work. 20 Initial conditions for the simulation results presented in this article are: n e ϭ10 6 cm Ϫ3 ͑a sinusoid peaked at the midplane͒.…”

Section: ͑1͒supporting

confidence: 82%

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Simulations of step responses of electronegative radio-frequency capacitively coupled discharges

Jing

Ventzek

Sakai

et al. 1998

Journal of Applied Physics

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The transient response of electronegative radio-frequency glow discharges is important for process control, charge free etching, and highly selective etch applications. The step response of typical electronegative process gases (silane at 1 Torr and chlorine at 100 mTorr) is studied using a drift-diffusion model for silane and a three-moment model for chlorine. The silane simulations include a blocking capacitor whereas the chlorine results do not. For the silane results with a blocking capacitor in series with the plasma, it is found that there are three types of transients. Depending on the final steady-state value of the source rf voltage, the step response can be characterized either by smooth transitions in the number densities of species in the discharge from one steady state to the next, temporary extinction of the discharge or a discharge mode characterized by temporary extinction and reignition of the discharge. In the case of silane definite thresholds separate the phenomena. The step response of the chlorine discharges is always characterized by a smooth transition from one steady state to the next. Smooth transitions from one steady state to the next in the case of step decreases in the source voltage are possible since decrease of the negative ion density in the bulk is controlled by ion–ion recombination. It appears that the temporary extinction of the discharge and natural pulsed steady state is the consequence of how the voltage is divided between the gap and the blocking capacitor during the transient and the fact that the attachment coefficient becomes larger than the ionization coefficient at low values of reduced electric field.

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Section: ͑1͒supporting

confidence: 82%

“…Typically, 10 000 particles were used. The Monte Carlo simulation includes a plasma chemistry model based on that of Kushner, 18 Sato and Tagashira, 19 and Date. 20 Details of the electron collisional processes considered in our model are included in Table I and cross sections taken from Ohmori, Shimozuma, and Tagashira.…”

Section: ͑1͒mentioning

confidence: 99%

Simulations of step responses of electronegative radio-frequency capacitively coupled discharges

Jing

Ventzek

Sakai

et al. 1998

Journal of Applied Physics

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“…The current I d may contain the conduction current I cond , which corresponds to the RMS value of spatially averaged conduction current in the bulk, and the displacement current I disp flowing to the discharge space even in the absence of discharges. 21,22) For simplicity, we deduce the values of parameters, such as electric field and electron temperature, under the condition that I d is much larger than I disp . To deduce E b , we have assumed that the length of the bulk plasma region increases with increasing d, whereas sheath thickness remains constant.…”

Section: Resultsmentioning

confidence: 99%

Comparison of Properties of Atmospheric-Pressure Radio Frequency He/SF₆/O₂and He/CF₄/O₂Discharges

Kimura¹,

Tanahashi²

2010

Jpn. J. Appl. Phys.

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Electrical and optical measurements of atmospheric-pressure radio frequency (13.56 MHz) He/SF 6 /O 2 and He/CF 4 /O 2 discharges are carried out by changing the mixture ratio of a fluoride compound gas to oxygen, where the fraction of He is fixed at 99.5%. Such discharges are produced between two planar electrodes of 40 mm at a gap length of 1.0 or 1.44 mm in the dissipated power range from 30 to 170 W. The phase difference between applied voltage and current in the He/SF 6 /O 2 discharges is approximately 20 -30 , whereas that in the He/CF 4 /O 2 discharges is approximately 50 -60 . The density of fluorine atoms in such discharges, which should be estimated by actinometry, depends on the mixture ratio of the fluorine compound gas to oxygen. The maximum density is observed when the ratios of the oxygen fraction to the sum of the oxygen and fluoride compound gas fractions are approximately 0.3 -0.5 for the He/SF 6 /O 2 discharges and 0.2 for the He/CF 4 /O 2 discharges. The density of fluorine atoms in such discharges is on the order of 10 14 cm À3 . In addition, the results obtained by ozone titration are compared with the density of fluorine atoms in the plasma, which is estimated by actinometry. #

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“…The most common hybrid, namely Fluid‐EEDF hybrid, is a fluid description of the discharge, except that the electron transport properties and electron impact reaction rate coefficients are obtained from a calculation of the electron energy distribution function (EEDF). The latter is found by solving the Boltzmann Equation , either directly or via a Monte Carlo scheme . The fluid “module” can include the species mass, momentum, and energy continuity equations, and Poisson's equation for the electric field.…”

Section: Hybrid Models and Simulationsmentioning

confidence: 99%

“…Hybrid models have been developed [47][48][49] in an attempt to preserve the accuracy and wealth of information of kinetic models, and at the same time reduce the computational burden. Some common hybrid modeling approaches are discussed below.…”

Section: Hybrid Models and Simulationsmentioning

confidence: 99%

Hybrid Simulation of Low Temperature Plasmas: A Brief Tutorial

Economou

2016

Plasma Processes & Polymers

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Modeling and simulation of low temperature plasmas is widely accepted as a useful tool from both physics and plasma reactor design points of view. Of the modeling approaches, hybrid models strive to combine the predictability of kinetic models with the lower computational burden of fluid models. This paper presents a brief tutorial of hybrid plasma modeling and representative simulation results using hybrid models. Whenever possible, these results are compared to kinetic and/or fluid simulations as well as experimental data.

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A hybrid Monte Carlo/fluid model of RF plasmas in a SiH/sub 4//H/sub 2/ mixture

Cited by 54 publications

References 29 publications

Simulations of step responses of electronegative radio-frequency capacitively coupled discharges

Simulations of step responses of electronegative radio-frequency capacitively coupled discharges

Comparison of Properties of Atmospheric-Pressure Radio Frequency He/SF₆/O₂and He/CF₄/O₂Discharges

Hybrid Simulation of Low Temperature Plasmas: A Brief Tutorial

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A hybrid Monte Carlo/fluid model of RF plasmas in a SiH/sub 4//H/sub 2/ mixture

Cited by 54 publications

References 29 publications

Simulations of step responses of electronegative radio-frequency capacitively coupled discharges

Simulations of step responses of electronegative radio-frequency capacitively coupled discharges

Comparison of Properties of Atmospheric-Pressure Radio Frequency He/SF6/O2and He/CF4/O2Discharges

Hybrid Simulation of Low Temperature Plasmas: A Brief Tutorial

Contact Info

Product

Resources

About

Comparison of Properties of Atmospheric-Pressure Radio Frequency He/SF₆/O₂and He/CF₄/O₂Discharges