Herein
is presented the first report on the atomic layer deposition
(ALD) of ternary Cu2SnS3 (CTS) thin films within
a reasonably wide temperature window of 150–190 °C using
a supercycle growth strategy. The use of rationally designed deposition
schemes that involved matching the diffusion length of cations to
the sublayer thickness in each supercycle resulted in homogeneous
monoclinic CTS films. The optoelectronic quality of the films was
manifested by the presence of a double absorption edge, which is scarcely
observed with other deposition techniques. Further characterization
of the films showed that excursions from ideal stoichiometry minimally
impacted optical properties, whereas electrical properties were significantly
impacted, with hole concentration varying by orders of magnitude.
On the other hand, postdeposition heat treatments initially aimed
at reducing recombination-active grain boundaries strongly affected
both optical and electrical properties. This was identified to be
the result of cation disorder induced during heat treatment, which
triggered a progressive phase transformation from monoclinic to cubic
CTS. The first-order effect of this transformation was a decrease
in photoabsorptive ability and the creation of intra-band-gap states
leading to electronic disorder. In addition, the heat treatment resulted
in notable alterations in hole concentrations. From the perspective
of solar cell performance, the results suggest that deviation from
stoichiometry and the formation of secondary phases in near stoichiometric
CTS films will strongly affect fill factors, while open-circuit voltage
(V
oc) and short-circuit current (J
sc) are less affected. Conversely, cation disorder
associated with phase transformation during heat treatment will have
a more direct impact on V
oc and J
sc. Last, the photovoltaic viability of the
ALD CTS films was demonstrated, with the best cell obtained after
heat treatment yielding a power conversion efficiency of 1.75%, which
although encouraging represented a compromise between degraded bulk
optoelectronic quality and reduced recombination-active grain boundaries.