“…Their sizes range from microns to submillimeter, and the positioning precision of the system can reach micron or even submicron or nanometer levels. This kind of system has been applied in microassembly [ 1 , 2 , 3 ], microinjection [ 4 , 5 ], bioengineering [ 6 , 7 , 8 , 9 , 10 , 11 ], minimally invasive surgery [ 12 , 13 , 14 , 15 ], and other microscopic fields. The motion control system with three translational degrees of freedom and driven by ball screw, guide rail, slider, and motor, is one of the various motion control systems.…”