A homodyne Michelson interferometer with sub-picometer resolution

Pisani, Marco

doi:10.1088/0957-0233/20/8/084008

Cited by 51 publications

(26 citation statements)

References 23 publications

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“…We perform the analog of operation (2) using the homemade circuit shown in figure (1). The raw contrasts C raw x and C raw y delivered by a quadrature phase interferometer can be compensated by two offsets O cor x and O cor y to deliver two symmetric contrasts C x (t) and C y (t).…”

Section: Principle Of the Real-time Analog Sensormentioning

confidence: 99%

“…Dimensional measurements play an important role in many industrial and instrumentation applications [1]. In nano-mechanical and rheological measurements, it is important to apply and to measure oscillatory motions of very low amplitude in order to probe the visco-elastic modulii of nano-scale objects at a vanishing small strain, without impacting their molecular or interfacial arrangements.…”

Section: Introductionmentioning

confidence: 99%

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Real-time single analog output for quadrature phase interferometry

Barraud

García

Cross

et al. 2017

Meas. Sci. Technol.

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We present a dynamic displacement sensor based on a quadrature phase interferometer, providing a real-time analog output of the differential displacement between two mobile surfaces. The sensor offers a sub-picometer resolution with a sensitivity essentially uniform over a distance range extending to several micrometers, and can be used to measure the amplitude and phase of very small oscillations in nano-mechanical testing. We demonstrate its use in nano-rheology, by studying the flow in nanometric liquid films at very small strain rates.

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Section: Principle Of the Real-time Analog Sensormentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Real-time single analog output for quadrature phase interferometry

Barraud

García

Cross

et al. 2017

Meas. Sci. Technol.

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“…Optical interferometry provides a convenient technique for measuring microscopic displacements (Pisani, 2009;Bitou, 2009), especially those large enough (larger than 2000 nm) for fringe counting techniques to be used (Wylde and Hubbard, 1999). However, for displacements that are only a small fraction of a light wavelength (such as in this work), fringe counting techniques are no more adequate, because of systematic errors involved in the method.…”

Section: Introductionmentioning

confidence: 96%

A simple interferometric method to measure the calibration factor and displacement amplification in piezoelectric flextensional actuators

Barbosa¹,

Nader²,

Higuti³

et al. 2010

Sba Controle & Automação

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Laser interferometry is a well-established technique for the characterization of piezoelectric actuators. In this work, by using a low cost Michelson interferometer, the measurement of the calibration factor and the displacement amplification of a novel piezoelectric flextensional actuator (PFA), designed by using the topology optimization method, is performed. A simple method, based on small phase modulation depth when the PFA is driven by a triangular waveform, allows the absolute interferometer calibration. The free-displacement of the PFA for various drive voltages is measured and the displacement amplification is determined. The linearity and frequencyresponse of the PFA are evaluated up to 20 kHz

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“…Laser interferometers have been extensively used in high precision displacement measurements [ 1 , 2 , 3 , 4 , 5 , 6 ]. With the development of science and technology, the requirements for measurement accuracy of laser interferometers have become higher and higher.…”

Section: Introductionmentioning

confidence: 99%

A Method for Measurement of Nonlinearity of Laser Interferometer Based on Optical Frequency Tuning

Zhu

Ren³

et al. 2017

Sensors

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Abstract:A method for measuring the nonlinearity of laser interferometer using optical frequency tuning technique is presented in this paper. The basic principle of this method is to make the fractional part of an interference fringe change by tuning the laser frequency and determining the nonlinearity of interferometer by comparing the fractional fringe change measured by the interferometer to that calculated from the laser frequency change. An experimental interferometric system with a wavelength tunable laser source is set up and the nonlinearity of the interferometer is measured. Since it does not require the precise displacement mechanism to produce the optical path difference change, this method is more convenient to use and may achieve a higher accuracy than the conventional measurement methods. The nonlinearity of the arbitrary interferometric phase can be measured by changing the laser frequency with this method. Experiments results have shown that the repeatability of nonlinearity measurement is less than 0.2 nm. This method can be applied to interferometry-based high precision dimensional measurements, such as coordinate measurement and displacement sensor calibration.

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A homodyne Michelson interferometer with sub-picometer resolution

Cited by 51 publications

References 23 publications

Real-time single analog output for quadrature phase interferometry

Real-time single analog output for quadrature phase interferometry

A simple interferometric method to measure the calibration factor and displacement amplification in piezoelectric flextensional actuators

A Method for Measurement of Nonlinearity of Laser Interferometer Based on Optical Frequency Tuning

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