Electricity and power generation is an essential part of our life. However, power generation activities also create by-products (such as sulphur oxides, nitrogen oxides, carbon monoxide, etc), which can be dangerous when released to the atmosphere. Sensors, as part of the control system, play very vital role for the flue gas cleaning processes in power plants. This thesis concerns the development of Silicon Carbide Field Effect Transistor (SiC-FET) gas sensors as sensors for sulfur containing gases (SO 2 and H 2 S) used as part of the environmental control system in power plants. The works includes sensor deposition and assembly, sensing layer characterization, operation mode development, performance testing of the sensors in a gas mixing rig in the laboratory and field test in a desulfurization pilot unit, and both experimental and theoretical studies on the detection mechanism of the sensors.The sensor response to SO 2 was very small and saturated quickly. SO 2 is a very stable gas and therefore reaction with other species requires a large energy input. SO 2 mostly reacts with the catalyst through physisorption, which results in low response level. Another problem was that once it finally reacted with oxygen and adsorbed on the surface of the catalyst in form of a sulfate compound, it is desorbed with difficulty. Therefore, the sensor signal saturated after a certain time of exposure to SO 2 . Different gate materials were tested in static operation (Pt, Ir, Au), but the saturation phenomena occurred in all three cases. Dynamic sensor operation using temperature cycling and multivariate data analysis could mitigate this problem. Pt-gate sensors were operated at several different temperatures in a cyclic fashion. One of the applied temperatures was chosen to be very high for a short time to serve as cleaning step. This method was also termed the virtual multi sensor method because the data generated could represent the data from multiple sensors in static operation at different temperatures. Then, several features of the signal, such as mean value and slope, were extracted and processed with multivariate data analysis. Linear Discrimination Analysis (LDA) was chosen since it iii allows controlled data analysis. It was shown that it was possible to quantify SO 2 with a 2-step LDA. The background was identified in the first step and SO 2 was quantified in the second step. Pt sensors in dynamic operation and 2-step LDA evaluation has also demonstrated promising results for SO 2 measurement in the laboratory as well as in a desulfurization pilot unit. For a commercial sensor, algorithm have to be developed to enable on-line measurement in real time.It was observed that Ir-gate sensors at 350 o C were very sensitive to H 2 S. The response obtained by Ir sensors to H 2 S was almost five times larger than that of Pt sensors, which might be due to the higher oxygen coverage of Ir. Moreover, Ir sensors were also more stable with less drift during the operation as a result of higher thermal stability. However, th...