A Highly Sensitive MEMS Silicon-Hair Device Reproducing the Function of Hair Follicle

Hamamoto, Koki; Terao, Kyohei; Shimokawa, Fusao; Takao, Hidekuni

doi:10.1541/ieejsmas.139.180

Cited by 1 publication

(1 citation statement)

References 4 publications

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“…The hair-like sensor can realize the effective measurement of linear/angular velocity, acceleration, and other information so that it can be widely used in lateral line systems, inertial navigation systems, flow sensing, situation awareness, and so forth. According to the different realization principles, the hairlike sensor can be divided into piezo-resistive [5][6][7][8], capacitive [9][10][11], piezoelectric [12,13], resonant [14][15][16][17][18][19], and so on [1,3,4]. Resonant sensors can realize quasi-digital signal output, which can effectively avoid the problem of low measurement accuracy caused by analogto-digital conversion.…”

Section: Introductionmentioning

confidence: 99%

Design and Development of a Hair-like Sensor with Bridge-Type Flexible Amplification Mechanisms

Li,

Cao,

Zhang

et al. 2023

Sensors

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Compared with lever-type amplification mechanisms, bridge-type flexible amplification mechanisms have advantages in terms of amplification ratio and structural compactness. Therefore, they can effectively replace the lever-type amplification mechanism in the existing hair-like sensors and realize the development of miniature hair-like sensors with high sensitivity. With that in mind, a highly sensitive hair-like sensor based on a bridge-type amplification mechanism with distributed flexibility is presented to measure the airflow rate. First, the structural composition and operating principle of the hair-like sensor are described. Then, detailed design and analysis of the hair-like sensor are carried out, focusing on the design of the hair post structure, amplification mechanism, and resonator. Furthermore, the designed hair-like sensor is processed and prepared, and some experimental studies are conducted. The experimental results demonstrate that the developed hair-like sensor can measure the airflow rate with high sensitivity up to 8.56 Hz/(m/s)2. This provides a new concept for the structural design of hair-like sensors and expands the application of bridge-type flexible amplification mechanisms in the field of micro/nano sensors.

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