2016
DOI: 10.3390/s16060794
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A Highly Sensitive Fiber-Optic Fabry–Perot Interferometer Based on Internal Reflection Mirrors for Refractive Index Measurement

Abstract: In this study, a new type of highly sensitive fiber-optic Fabry–Perot interferometer (FFPI) is proposed with a high sensitivity on a wide refractive index (RI) measurement range based on internal reflection mirrors of micro-cavity. The sensor head consists of a single-mode fiber (SMF) with an open micro-cavity. Since light reflections of gold thin films are not affected by the RI of different measuring mediums, the sensor is designed to improve the fringe visibility of optical interference through sputtering t… Show more

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Cited by 45 publications
(16 citation statements)
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References 39 publications
(57 reference statements)
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“…The cantilever FP structure was sensitive to vibrations and able to measure frequencies in the range of 1Hz to 40 kHz. Coating was also put onto the FPI walls to increase the mirror reflectivity by a factor of about 26 [211], which has been demonstrated with a high sensitivity on a wide RI measurement range [212]. Recently, a multi-cavity structure was fabricated by the FIB technique by combining the concepts of solid silica cavity and gap cavity [207].…”
Section: Focused Ion Beam (Fib) Micro-machined Devicesmentioning
confidence: 99%
“…The cantilever FP structure was sensitive to vibrations and able to measure frequencies in the range of 1Hz to 40 kHz. Coating was also put onto the FPI walls to increase the mirror reflectivity by a factor of about 26 [211], which has been demonstrated with a high sensitivity on a wide RI measurement range [212]. Recently, a multi-cavity structure was fabricated by the FIB technique by combining the concepts of solid silica cavity and gap cavity [207].…”
Section: Focused Ion Beam (Fib) Micro-machined Devicesmentioning
confidence: 99%
“…From the above description, as the most important sensing element, the membrane plays a vital role in the overall performance of the fiber optic EFPI sensor; e.g., the sensitivity and linear range, as well as the flatness of the central reflective region of the membrane which will influence the light intensity of Fabry-Perot interference [13,14]. …”
Section: Sensor Designmentioning
confidence: 99%
“…In most cases, the IM structure, as shown in Figure 2a, is extensively adopted for sensing the acoustic signals, normally made of single crystal silicon with the membrane thickness of tens of micrometers [12,13,14,15,16,17]. Obviously, only two geometrical parameters are involved in designing the structure, i.e., film thickness h and radius R , both dependent on the fundamental frequency of membrane required for a certain magnitude of PDs.…”
Section: Sensor Designmentioning
confidence: 99%
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“…Among the LOF technology platforms, “Lab-on-Tip” devices are particularly attractive because of the simplicity of the integration of the sensing material on the fiber tip [4]. The application of LOF approach to temperature sensing has been demonstrated using several measuring principles, like for example Fabry-Perot interferometers [5,6], Fiber Bragg gratings [7,8] or surface plasmon resonance [9,10]. Although often moderate sensitivities are reported, with resolutions of 0.55 C [5], the response time may be several seconds [5,8].…”
Section: Introductionmentioning
confidence: 99%