A highly selective MEMS transducer for hydrogen sensing based on stress modification in palladium thin films

Walewyns, Thomas; Emmerechts, Carl; Gérard, Pierre; André, Nicolás; Francis, Laurent

doi:10.1109/icsens.2015.7370404

Cited by 6 publications

(9 citation statements)

References 10 publications

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“…This deformation transmits to the movable electrode via the membrane anchor, and hydrogen is detected as a change in electrostatic capacitance. As shown in Figure 11, with a conventional structure, 8 deformation that occurs at the membrane edges almost does not contribute to the change of capacitance, and sensitivity is low. On the other hand, in the proposed structure, the movable electrode moves parallel to the fixed electrode.…”

Section: Sensor Structure and Working Principlementioning

confidence: 98%

“…Fastresponse hydrogen sensors are therefore required. 8 Resistive sensors utilize the fact that the electrical resistance of Pd changes with hydrogen absorption. Conventional hydrogen sensors are mainly of the catalytic type, semiconducting metal oxide type, and thermal conductivity type, 2 and all of these need a heater for hydrogen sensing.…”

Section: Introductionmentioning

confidence: 99%

“…These include resistive type sensors, 3,4 work functionbased sensors, [5][6][7] and capacitive MEMS sensors. 8 Resistive sensors utilize the fact that the electrical resistance of Pd changes with hydrogen absorption. Work function-based sensors utilize the effect of hydrogen on the Pd work function, including sensors that use Schottky diodes using PdNi and field-effect transistors with Pd gates.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

A Review of Capacitive MEMS Hydrogen Sensor using Pd based Metallic Glass with Fast Response and Low Power Consumption

et al. 2018

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This paper reports on a capacitive MEMS hydrogen sensor using Pd-based metallic glass (MG) for future hydrogen society. First, we investigate PdCuSi as a Pd-based MG and show that this material is promising for capacitive MEMS hydrogen sensor. Second, we employ the Pd-based MG in a hydrogen sensor that has an inverted Tshaped electrode. The sensor is fabricated by a surface micromachining process. We show that the fabricated hydrogen sensor exhibits hysteresis-free and fast response properties at room temperature. K E Y W O R D Scapacitive, hydrogen sensor, hydrogen society, MEMS, Pd-based metallic glass 2 SENSING FILMS Pd-based metallic glassPd has excellent hydrogen absorption characteristics but hydrogen is absorbed as a metal hydride, and as a result, the response to hydrogen is slow, and heat is required to release 70

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Section: Sensor Structure and Working Principlementioning

confidence: 98%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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A Review of Capacitive MEMS Hydrogen Sensor using Pd based Metallic Glass with Fast Response and Low Power Consumption

et al. 2018

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“…Several works in this system have emerged to use this integrated system into many different vertical solutions and try to tie one solution platform for many monolithic systems. The highly selective MEMS transducer for hydrogen sensing based on voltage modification on palladium thin-films was investigated by [7]. Capacitive bimorph aluminum/palladium-based MEMS transducers were developed and integrated configured as clamp beams, carrying out rapid and highly selective hydrogen detection.…”

Section: Introductionmentioning

confidence: 99%

Design of gas concentration measurement and monitoring system for biogas power plant

Iswanto

Ma’arif

Kebenaran

et al. 2021

IJEECS

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Biogas is a gas obtained from the breakdown of organic matter (such as animal waste, human waste, and plants) by methanogenic bacteria in an oxygen-free (anaerobic) state. The biogas produced mainly consists of 50-70% methane, 30-40% carbon dioxide, and other gases in small amounts. The gas produced has a different composition depending on the type of animal that produces it. It is challenging to obtain biogas concentration data because the monitoring equipment is currently minimal. Therefore, this research discusses how to make a monitoring system for biogas reactors. Sensors are installed in the digester tank and storage tank. The installed sensors are the MQ-4 sensor to detect methane gas (CH4), MG-811 sensor to detect carbon dioxide (CO2) gas, MQ-136 sensor to detect sulfide acid gas (H2S), and Thermocouple Type-K to detect temperature. The sensor will send a signal to the control unit in Arduino Mega 2560, then processed and displayed on the liquid crystal display (LCD). The sensor calculation results' accuracy is not much different from the reference based on the sensor readings. The sensor deviation standard is below 5.0, indicating that the sensor is in precision. The sensor's linearity of MQ-4 is 0.7%, the MG-811 is 0.17%, the MQ-136 is 0.29%, and the Type-K Thermocouple is 1.19%. The installed sensor can be used to monitor gas concentration and temperature in a biogas reactor.

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Section: Introductionmentioning

confidence: 99%

A review of capacitive MEMS hydrogen sensor using Pd‐based metallic glass with fast response and low power consumption

Yamazaki

Hayashi

Masunishi

et al. 2019

Elect Comm in Japan

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This paper reports on a capacitive MEMS hydrogen sensor using Pd‐based metallic glass (MG) for future hydrogen society. First, we investigate PdCuSi as a Pd‐based MG and show that this material is promising for capacitive MEMS hydrogen sensor. Second, we employ the Pd‐based MG in a hydrogen sensor that has an inverted T‐shaped electrode. The sensor is fabricated by a surface micromachining process. We show that the fabricated hydrogen sensor exhibits hysteresis‐free and fast response properties at room temperature.

show abstract

A highly selective MEMS transducer for hydrogen sensing based on stress modification in palladium thin films

Cited by 6 publications

References 10 publications

A Review of Capacitive MEMS Hydrogen Sensor using Pd based Metallic Glass with Fast Response and Low Power Consumption

A Review of Capacitive MEMS Hydrogen Sensor using Pd based Metallic Glass with Fast Response and Low Power Consumption

Design of gas concentration measurement and monitoring system for biogas power plant

A review of capacitive MEMS hydrogen sensor using Pd‐based metallic glass with fast response and low power consumption

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