A high sensitivity SOI electric-field sensor with novel comb-shaped microelectrodes

Yang, Pengfei; Peng, Chunrong; Zhang, Haiyan; Liu, Shiguo; Fang, Dongming; Xia, Shanhong

doi:10.1109/transducers.2011.5969165

Cited by 27 publications

(28 citation statements)

References 6 publications

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“…Rotating electric field mills are commonly used for dc field measurements, however, they are expensive and require frequent maintenance. MEMS field mills have been explored as solutions [5][6][7]. However, their shielding shutter is affected by high fields, leading to incorrect measurements.…”

Section: Introductionmentioning

confidence: 99%

Torsional Moving Electric Field Sensor with Modulated Sensitivity and without Reference Ground

Liyanage

Shafai

Chen

et al. 2017

Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017

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Abstract:A MEMS electric field sensor is presented with wide measurement resolution and adjustable sensitivity. The sense membrane is mounted using torsional springs and employs opposite biased electrodes on its surface, causing rotation in presence of an electric field, enabling operation without reference ground. Control of electrode bias enables adjustable linear measurement range from V/m to MV/m. Compared to earlier works with vertical moving sense membranes, higher sensitivity is achieved for the same bias voltage. Employing on-board electronics to enable independent resonant operation, a noise limited resolution of 3 V/m was achieved.

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Section: Introductionmentioning

confidence: 99%

Torsional Moving Electric Field Sensor with Modulated Sensitivity and without Reference Ground

Liyanage

Shafai

Chen

et al. 2017

Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017

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“…In recent years, various groups have worked to develop micromachined electric field mills (MEFMs). In [3][4][5], electrostatic actuation was used to move a perforated grounded shutter over sense electrodes. Horenstein et al was the first to demonstrate such an MEFM [3].…”

Section: Introductionmentioning

confidence: 99%

“…According to the shutter movement direction, the MEFMs introduced above can be divided into two categories: lateral movement [3][4][5][6][7] and vertical movement [8,9]. Lateral movement shutters usually suffer from the displacement of the shutter under strong electric field, which can affect and reduce the sensitivity.…”

Section: Introductionmentioning

confidence: 99%

Micromachined Electric Field Mill Employing a Vertical Moving Shutter

Chen

Shafai

Rajapakse

et al. 2014

Procedia Engineering

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“…In [3,4,5], the vertical comb electrodes is used to realize the three-axis accelerometer. In [6], a combshaped microelectrodes is designed to obtain a high sensitivity accelerometer. In [7,8], the surface electrodes is designed, the lateral capacitance-based transducer enabling large capacitance change per acceleration and allowing a large dynamic range without electrode contact.…”

Section: Introductionmentioning

confidence: 99%

A high sensitivity micromachined accelerometer with an enhanced inertial mass SOI MEMS process

Xie

Meng

Yuan

2013

The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems

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This paper provides an enhanced inertial mass SOI MEMS process for the fabrication of a high sensitivity micromachined accelerometer. In the proposed process, the handle layer of the SOI wafer is used as an enhanced inertial mass, in this way, the inertial mass of the accelerometer can increase 5-15 times. Therefore, the sensitivity of the MEMS accelerometer can be significantly increased. In this paper, an in-plane single-axis accelerometer is designed firstly. And then, the accelerometer is fabricated in a low resistivity SOI wafer with 60 m thickness device layer and 400 m thickness handle layer through the developed enhanced inertial mass SOI MEMS process. The sensitivity of the fabricated MEMS accelerometer is 2.257V/g, the linearity of output is within 0.5%, and the power spectral density of the noises is as low as 6.79uV/ Hz.

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A high sensitivity SOI electric-field sensor with novel comb-shaped microelectrodes

Cited by 27 publications

References 6 publications

Torsional Moving Electric Field Sensor with Modulated Sensitivity and without Reference Ground

Torsional Moving Electric Field Sensor with Modulated Sensitivity and without Reference Ground

Micromachined Electric Field Mill Employing a Vertical Moving Shutter

A high sensitivity micromachined accelerometer with an enhanced inertial mass SOI MEMS process

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