A high-sensitivity micromachined biosensor

Baselt, D

doi:10.1016/s0956-5663(97)88398-4

Cited by 1 publication

(1 citation statement)

References 29 publications

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“…The microstructure cantilever beam has many interesting applications. Nanoscale cantilever beam for biochemical, DNA, and protein sensing has been researched extensively [4][5][6][7][8][9][10][11]. Scientists at IBM Research Laboratory, Zurich, Switzerland developed a gas sensor on the basis of a resonant cantilever beam fabricated using CMOS technology, which is magnetically actuated [12 -14].…”

Section: Introductionmentioning

confidence: 99%

Modelling and measurements of a composite microcantilever beam for chemical sensing applications

Voiculescu

Zaghloul

McGill

et al. 2006

Proceedings of the Institution of Mechanical Engineers, Part C:

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A resonant microcantilever beam gas sensor was designed and fabricated in Carnegie Mellon University using complementary metal oxide semiconductor (CMU-CMOS) technology. The cantilever beam modified with a suitable sorbent coating was demonstrated as a chemical transducer for monitoring hazardous vapours and gases at trace concentrations. The design of the cantilever beam included interdigitated fingers to allow electrostatic actuation of the device and a piezoresistive Wheatstone bridge design to read out the deflection signal. The cantilever beam resonant frequency was modelled using the Euler-Bernoulli beam theory and ANSYS. The beam resonant frequency was measured with an optical laser Doppler vibrometer. Good agreement was obtained among the measured, simulated, and modelled resonant frequencies. A custom sorbent polymer layer was coated on the surface of the cantilever beam to allow its operation as a gas-sensing device. The frequency response as a function of exposure to the nerve agent simulant dimethylmethylphosphonate (DMMP) at different concentrations was measured, which allowed a demonstrated detection at a concentration of 20 ppb or 0.1 mg/m3. The air-polymer partition coefficient K, for DMMP was estimated and compared favourably with the known values for related polymers.

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