A high sensitivity carbon nanotubes enhanced PZT diaphram-based immunosensor array

Xu, Ting; Miao, Jianmin; Wang, Z.H.; Liu, Y.S.; Li, C.M.

doi:10.1109/sensor.2009.5285555

Cited by 1 publication

(2 citation statements)

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“…102,106 Second, the membrane deformation of PMUT sensors is not limited by a gap through which they can transmit a relatively high sound pressure. 107 Xu et al 108 developed two PMUT biosensors based on a PZT membrane for the detection of anti−goat IgG. In the first biosensing platform, goat IgG antibodies were directly deposited on the membrane surface as a bioreceptor.…”

Section: Membrane-based Mems/nems Biosensors Based On Dynamic Mode Tr...mentioning

confidence: 99%

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Membrane-Based NEMS/MEMS Biosensors

Stapf,

Selbmann,

Joseph

et al. 2024

ACS Appl. Electron. Mater.

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Membrane-based nano/microelectromechanical system (NEMS/MEMS) biosensors offer sustainable, costeffective, ultraminiaturized and easy-to-use analytical techniques for various applications, especially in the environmental and biomedical/pharmaceutical fields. Compared to cantilever-based MEMS/NEMS biosensors, membrane-based MEMS/NEMS biosensors have higher sensitivity, especially for liquid samples, as the back of the membrane is not in contact with the analyte solution, resulting in a higher signal-to-noise ratio. This review provides deep insight into the fundamentals, membrane materials, different biosensing designs, as well as various transducers used in membrane-based MEMS/NEMS biosensors. The performance of the developed membrane-based MEMS/NEMS biosensors is critically discussed, and their trends and challenges are highlighted. Among the reported biosensors, capacitive-based surface stress biosensors and capacitive micromachined ultrasonic transducer (CMUT) biosensors are emerging as sophisticated and sensitive platforms for biosensing with the ability to detect multiple targets simultaneously. Nevertheless, challenges remain in biosensor design, parameter optimization, and selection of appropriate membrane materials. Further research is imperative to improve the capabilities of these biosensors, particularly in advancing array technologies for the simultaneous detection of multiple analytes.

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Section: Membrane-based Mems/nems Biosensors Based On Dynamic Mode Tr...mentioning

confidence: 99%

“…Xu et al developed two PMUT biosensors based on a PZT membrane for the detection of anti–goat IgG. In the first biosensing platform, goat IgG antibodies were directly deposited on the membrane surface as a bioreceptor.…”

Section: Membrane-based Mems/nems Biosensors Based On Dynamic Mode Tr...mentioning

confidence: 99%