We report a high performance relative humidity (RH) microsensor by coating a few-layer graphene oxide (GO) flake over a photonic crystal (PC) cavity. Since the GO layer has a high water-activity and interacts with the evanescent cavity mode strongly, the exposure of GO-PC cavity in varied humidity levels results in significant resonant wavelength shifts, showing a slope of 0.68 nm/%RH in the range of 60%∼85% RH. By interrogating the power variation of the cavity reflection, the microsensor presents an ultrahigh sensitivity exceeding 3.9 dB/%RH. Relying on the unimpeded permeation of water molecules through the GO interlayers and microscale distribution of the cavity mode, the integrated sensor has a response time less than 100 ms, which promises successful measurements of human breathing. Combining with the ease of fabrication, this high performance RH sensor has potential applications requiring optical access, device compactness, and fast dynamic response.Detection of relative humidity (RH) is extremely important in environment monitoring, medicine and indoor air quality control, and chemical industry processing. Two-dimensional (2D) materials, including graphene, transition metal dichalcogenides, and phosphorene, have shown great promises for RH sensing due to their high surface-tovolume ratio, low noise and sensitivity of electronic properties to the surrounding variations [1][2][3]. Here, we report high performance 2D material-based RH sensing could be optically accessed as well by integrating the active material * Electronic address: