Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Syst 1999
DOI: 10.1109/memsys.1999.746886
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A high-performance silicon micropump for an implantable drug delivery system

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Cited by 82 publications
(40 citation statements)
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“…Alternative systems for pumping small fluid volumes have been produced over the last three decades [1,2]. Among these various kinds of devices, the reciprocating displacement micropump based on MEMS technology and having two check valves together with a fixed stroke volume has shown the capability to combine both low cost and good performance [3,4].…”
Section: Introductionmentioning
confidence: 99%
“…Alternative systems for pumping small fluid volumes have been produced over the last three decades [1,2]. Among these various kinds of devices, the reciprocating displacement micropump based on MEMS technology and having two check valves together with a fixed stroke volume has shown the capability to combine both low cost and good performance [3,4].…”
Section: Introductionmentioning
confidence: 99%
“…In the modern implantable medical electronics fi eld, typical implantable medical applications can be summarized as the following: (1) heart pacemakers [15,18,19] ; (2) implantable defi brillators [20 -22] ; (3) cochlear prostheses [23,24] ; (4) visual prostheses [25,26] ; (5) implantable pain controllers [27,28] ; (6) urinary incontinence prostheses [29,30] ; (7) neural recording microsystems [31 -33] ; (8) implantable measurement microsystems of physiological parameters [3,4,34] , such as pressure, temperature, and bioimpedance; (9) implantable measurement microsystems of biochemical parameters [1,35,36] , such as pH, glucose, and manner of ion concentrations; (10) drug delivery microsystems [11,37] ; and (11) wireless capsule endoscopy [2] . From the elaborate analyses of these typical implantable applications, a general model of IMEDs can be extracted, as illustrated in Figure 5.1 .…”
Section: General Model Of Implantable Medical Electronic Devicesmentioning
confidence: 99%
“…The most common actuator interface in a modern implantable device is the microelectrode, which is applied to stimulate nerves for all kinds of functional prostheses, such as cochlear, visual, and urinary incontinence prostheses. Another typical actuator interface is the microactuator, which can convert electrical energy into mechanical energy to operate micromechanical motors, pumps, or valves that meter delivery from a larger -scale reservoir [37] . Two key factors should be considered in designing the interfaces with living tissue.…”
Section: Interfaces With Living Tissuementioning
confidence: 99%
“…Piezoelectric materials [1][2][3] which can achieve the conversion between mechanical and electrical energy are widely used in piezoelectric functional devices including sensors, actuators and energy harvesters. Because of the excellent characteristics of the piezoelectric device, it is often used in the field of high technology.…”
Section: Introductionmentioning
confidence: 99%