A high performance electrostatic MEMS vibration energy harvester with corrugated inorganic SiO&lt;inf&gt;2&lt;/inf&gt;-Si&lt;inf&gt;3&lt;/inf&gt;N&lt;inf&gt;4&lt;/inf&gt; electret

Renaud, M.; Altena, G.; Goedbloed, M.H.; Nooijer, C. de; Matova, S.; Naito, Y.; Yamakawa, Toshio; Takeuchi, Hiroyuki; Onishi, K.; Schaijk, R. van

doi:10.1109/transducers.2013.6626861

Cited by 22 publications

(16 citation statements)

References 5 publications

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“…ΔC is proportional to the electrode sliding distance. Several prototypes of overlapping-area-change electret generators are also proposed using CYTOP or SiO 2 electret [25][26][27][28][29].…”

Section: Electrode Configurations and Mems Energy Harvestersmentioning

confidence: 99%

Electret based vibration energy harvester for sensor network

Suzuki

2015

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

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Energy harvesting is an enabling technology for wireless sensor network and low-power-consumption wearable devices. Among various energy sources in the environment, structural vibration and human motion are most abundantly distributed. Since kinetic energy of the vibration is mainly concentrated in the low-frequency range, electrostatic induction generator using electrets attracts much attention. Here, recent progress of electret materials, charging methods, and device technologies are discussed for further developments of MEMS electret energy harvesters.

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Section: Electrode Configurations and Mems Energy Harvestersmentioning

confidence: 99%

Electret based vibration energy harvester for sensor network

Suzuki

2015

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

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“…Electret-based vibration energy harvesters (E-VEHs) can be divided into two types, in-plane [14][15][16] and out-of-plane [17][18][19][20][21], depending on the vibration direction. In-plane E-VEHs operate under vibration parallel to the electret surface, whereas out-of-plane E-VEHs do so under vibration normal to the electret surface.…”

Section: Introductionmentioning

confidence: 99%

Electret Length Optimization of Output Power for Double-End Fixed Beam Out-of-Plane Electret-Based Vibration Energy Harvesters

Gao

Liu

et al. 2017

Energies

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Thanks to miniaturization, it is now possible to imagine self-powered systems that can harvest energy from the environment to produce electrical energy. Out-of-plane electret-based vibration energy harvesters (E-EVHs) are an effective and inexpensive energy harvester type that has attracted much attention. Increasing the capacitance of variable capacitors is an effective way to improve the output power of E-EVHs. In this paper, firstly an accurate capacitance theoretical model of a double-ended fixed beam out-of-plane E-EVHs which has 97% reliability compared with FEM (COMSOL Multiphysics) results is presented. A comparison of capacitance between the double-ended fixed beam structure and a cantilever structure of the same size indicates that the double-ended fixed beam structure has greater capacitance and capacitance variation. We apply this theoretical capacitance model to the mechanical-electrical coupling model of double-ended fixed beam out-of-plane E-EVHs and study harvesters' output performances for different electret lengths by numerical and experimental method, respectively. There exists an optimal electret length to harvest maximum power in our simulation results. Enhanced electrostatic forces with increasing the electret length emphasizes the soft spring effect, which widens the half power bandwidth and lowers the resonance frequency. Increasing the length of the electret can reduce the resistance of the optimum load. The experimental results show trend consistent with the numerical predictions. The maximum output power can reach 404 µW (134.66 µW/cm 2 /g) at the electret length of 40 mm when the external acceleration and the frequency were 5 m/s 2 and 74 Hz, respectively. The maximum bandwidth reaches 2.5 Hz at the electret length of 60 mm. Therefore, the electret length should be placed between 40 mm and 60 mm, while ensuring a higher output power and also get a larger bandwidth in practical applications.

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“…In order to improve the low efficiency of electrostatic devices compared to other transduction techniques, researchers have studied various methods, such as integrating an electret layer to increase charge density [16], voltage constrained charge extraction [17], optimizing structural dimensions [18], or using magnetic coupling to actuate electrostatic transducers [19]. Recently, a 1 cm sized electret-based harvester with a corrugated electrode configuration is demonstrated to provide 160 W at 2.9 g vibration at 728 Hz [20]. Compared to electrostatic and electromagnetic harvesters, piezoelectric transducers have advantages of high power density, easiness in scalability, and medium impedance and high voltage output that simplifies the design of a power management circuitry [21], [22].…”

Section: Introductionmentioning

confidence: 99%

A Micro Inertial Energy Harvesting Platform With Self-Supplied Power Management Circuit for Autonomous Wireless Sensor Nodes

Aktakka

Najafi

2014

IEEE J. Solid-State Circuits

161

104

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A 0.25 cm 3 autonomous energy harvesting micro-platform is realized to efficiently scavenge, rectify and store ambient vibration energy with batteryless cold start-up and zero sleep-mode power consumption. The fabricated compact system integrates a high-performance vacuum-packaged piezoelectric MEMS energy harvester with a power management IC and surface-mount components including an ultra-capacitor. The power management circuit incorporates a rectification stage with~30 mV voltage drop, a bias-flip stage with a novel control system for increased harvesting efficiency, a trickle charger for permanent storage of harvested energy, and a low power supply-independent bias circuitry. The overall system weighs less than 0.6 grams, does not require a precharged battery, and has power consumption of 0.5 µW in activemode and 10 pW in sleep-mode operation. While excited with 1 g vibration, the platform is tested to charge an initially depleted 70 mF ultra-capacitor to 1.85 V in 50 minutes (at 155 Hz vibration), and a 20 mF ultra-capacitor to 1.35 V in 7.5 min (at 419 Hz). The end-to-end rectification efficiency from the harvester to the ultra-capacitor is measured as 58-86%. The system can harvest from a minimum vibration level of 0.1 g.

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A high performance electrostatic MEMS vibration energy harvester with corrugated inorganic SiO<inf>2</inf>-Si<inf>3</inf>N<inf>4</inf> electret

Cited by 22 publications

References 5 publications

Electret based vibration energy harvester for sensor network

Electret based vibration energy harvester for sensor network

Electret Length Optimization of Output Power for Double-End Fixed Beam Out-of-Plane Electret-Based Vibration Energy Harvesters

A Micro Inertial Energy Harvesting Platform With Self-Supplied Power Management Circuit for Autonomous Wireless Sensor Nodes

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