A high performance 3.0 mm ×3.0 mm ×1.1 mm FBAR full band Tx filter for U.S. PCS handsets

Feld, David A.; Wang, K.; Bradley, P.; Barfknecht, A.T.; Ly, B.; Ruby, R.

doi:10.1109/ultsym.2002.1193545

Cited by 13 publications

(8 citation statements)

References 3 publications

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“…First, Uncd is deposited on the polished surface of the silicon wafer. after that, the bottom metal layer is sputtered and then patterned by dry-etching in sF 6 and o 2 plasma [ Fig. 8(a)].…”

Section: B Simulationmentioning

confidence: 99%

“…despite their desirable performance, saW devices cannot be integrated with other circuitries and could suffer from a relatively large temperature coefficient of frequency [2]- [5]. more recently, Fbar filters have been successfully manufactured and utilized for a broad range of applications [6]- [8]. These filters offer large bandwidths and very low insertion loss in addition to considerable size/cost benefits.…”

Section: Introductionmentioning

confidence: 99%

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Low-loss lateral-extensional piezoelectric filters on ultrananocrystalline diamond

Fatemi

Abdolvand

2013

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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In this work, lateral-extensional thin-film piezoelectric- on-diamond (TPoD) filters with very low insertion loss (IL) values (<4 dB) are reported. Two different lateral-extensional modes of a resonant structure are coupled together to realize a two-pole filter. The filters of this work exhibit low IL values, with fractional bandwidth between 0.08% and 0.2%, and have a very small footprint. This paper reports on the lowest IL in the literature for lateral-extensional thin-film piezoelectric filters with 50 Ω terminations in the GSM frequency band (~900 MHz). The narrow-band filters of this work are fabricated on three ultrananocrystalline diamond substrates to achieve higher frequencies without excessive reduction in the feature size. The paper also thoroughly studies the parameters that affect the performance of such filters and then discussions are evaluated by the statistical data collected from the fabricated wafers.

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Section: B Simulationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Low-loss lateral-extensional piezoelectric filters on ultrananocrystalline diamond

Fatemi

Abdolvand

2013

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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“…Although there have been numerous investigations on FBAR filters, FBARs and auxiliary circuits are still manufactured separately and assembled using wire bonding interconnection process [4].…”

Section: Introductionmentioning

confidence: 99%

Ultra-miniature monolithic FBAR filters for wireless applications

Shim

Park

Nam

et al. 2005

IEEE MTT-S International Microwave Symposium Digest, 2005.

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This paper presents ultra-miniature monolithic transmit (Tx) filters for 1900 MHz PCS using thin film bulk acoustic resonators (FBAR) technology. Conventional FBAR filters often include multiple tuning inductors, which have prevented the miniaturization and the monolithic integration of the filters. However, the developed filter has a novel circuit configuration using a single integrated inductor to minimize the size. The FBAR block consists of seven FBARs electrically coupled in a ladder topology. A meander type inductor is used for simplicity of fabrication processes and is optimized to increase the receive (Rx) band rejection performance. The filters are hermetically packaged at a wafer-level, which enables us to achieve a size of 1.0 mm × 1.0 mm × 0.7 mm. The packaged filters showed high performance with insertion loss less than 3.3 dB and Rx band rejection over 35 dB.Index Terms -Bulk acoustic wave devices, acoustic resonator filters, bandpass filters, thin film inductors, wafer-scale integration.

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“…The technology, measured device performance, and modeling of FBAR resonators has been described in detail previously [3,1,2]. A quick review of the technology is given.…”

Section: Description Of Fbar Device Technologymentioning

confidence: 99%

“…Starting about three years ago single filter transmit solutions that were small, inexpensive and which had fast high frequency rolloff and were thus able to provide the necessary Rx filtering function, came on the market [1,2]. But because these filters did not have fast rolloff on the low frequency side of the band they could not provide the desired image rejection.…”

Section: Introductionmentioning

confidence: 99%

Demonstration of a novel 2.0 mm x 1.6 mm x 0.9 mm PCS Tx filter with steep pass band rolloffs & high rejection

Feld

Bradley

et al.

IEEE Ultrasonics Symposium, 2004

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Improved process control of a Thin Film Bulk Acoustic (FBAR) resonator process has enabled the development of a low cost, high performance transmit filter capable of replacing the existing dual-filter "split-band" solution used in many PCS communication systems today. This transmit filter, centered at 1880 MHz, meets seven stringent specification requirements over a temperature range from -30C to +85C: (1) insertion loss < 3.5 dB over a 60 MHz (3%) bandwidth, (2) above band rejection > 35 dB over the 60 MHz (3%) rx band, (3) below band rejection > 25 dB over the 60 MHz (3%) image band, (4) low-frequency rolloff <9.0 MHz (from 3.5 dB to 25 dB), (5) high-frequency rolloff <8.0 MHz (from 3.5 dB to 35 dB), (6) bluetooth rejection (at 2.5 GHz) >30 dB and 2 nd harmonic rejection (at 3.8 GHz) > 20 dB, and (7) an in-band return loss better than 10 dBs. We present a novel filter design packaged in a 2.0 mm x 1.6 mm x 0.9 mm chip-on-board package, which meets these constraints. We discuss the process control requirements needed to produce this filter with high yields.

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A high performance 3.0 mm ×3.0 mm ×1.1 mm FBAR full band Tx filter for U.S. PCS handsets

Cited by 13 publications

References 3 publications

Low-loss lateral-extensional piezoelectric filters on ultrananocrystalline diamond

Low-loss lateral-extensional piezoelectric filters on ultrananocrystalline diamond

Ultra-miniature monolithic FBAR filters for wireless applications

Demonstration of a novel 2.0 mm x 1.6 mm x 0.9 mm PCS Tx filter with steep pass band rolloffs & high rejection

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