2015
DOI: 10.1587/elex.12.20141035
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A high-order sigma-delta accelerometer interface circuit

Abstract: A high-order high-Q closed-loop sigma-delta (ΣΔ) capacitive microaccelerometer interface circuit is presented in this work. The quantization noise in baseband of the interface circuit is greatly suppressed by a highorder loop shaping, and the mechanical noise is deceased by the use of a vacuum-packaged sensor element. A lead compensator is used to damp the high-Q element to guarantee a stable high-order system. The interface circuit is implemented in a standard CMOS process, and the power dissipation is 10 mW … Show more

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Cited by 4 publications
(4 citation statements)
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“…The accelerometer is fully superior to the previous research presented in [4] which is quantified by 1-bit quantizer. …”
Section: Resultsmentioning
confidence: 83%
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“…The accelerometer is fully superior to the previous research presented in [4] which is quantified by 1-bit quantizer. …”
Section: Resultsmentioning
confidence: 83%
“…A high performance inertial sensor as described in previous paper [4], which uses a AEÁ topology interface to form closed-loop control system, has strict requirements on the output SNR/SNDR. This paper will introduce an interface circuit AEÁ accelerometer with not only low noise advantage but also low harmonics distortion property.…”
Section: Proposed Architecturementioning
confidence: 99%
“…However, extra power was induced by designing an extra oscillator, and the PWM signal had to be converted into a digital signal again for digital signal processing (DSP). To directly output a digital signal, a ∆Σ feedback loop approach [10][11][12][13][14]17] was proposed. In this approach, conventional integrators designed with operational trans-conductance amplifiers (OTAs) are commonly used.…”
Section: Introductionmentioning
confidence: 99%
“…To overcome the above-mentioned nonlinearity induced by the mismatch with a simpler topology, a pulse width modulation force (PWM) or ΔΣ feedback loop approach in [ 10 , 11 , 12 , 13 , 14 , 15 , 16 ] is presented. These are able to eliminate the nonlinearity in voltage-to-force transduction.…”
Section: Introductionmentioning
confidence: 99%