A High-Linearity Closed-Loop Capacitive Micro-Accelerometer Based on Ring-Diode Capacitance Detection

Abstract

This paper presents an implementation scheme and experimental evaluation of a high-linearity closed-loop capacitive accelerometer based on ring-diode capacitance detection. By deducing the capacitance detection model of the ring-diode considering the influence of the diode, the existing theoretical model error of the ring-diode is corrected and a closed-loop scheme of reusing the detection electrode and the control electrode of the MEMS die is designed to apply this detection scheme to the parallel-plate accelerometer, which only has three independent electrodes. After analyzing the non-linear problems in the existing closed-loop control schemes, a theoretically absolute linear closed-loop control scheme is proposed, and an integrated closed-loop accelerometer is realized by combining the closed-loop diode detection. The experimental results of the ring-diode detection model are in agreement with the theoretical formula. The non-linearity of the accelerometer within ±1 g after the closed-loop is 130 ppm, compared with 1500 ppm when the open-loop is used.