A High Dynamic Range Closed-Loop Stiffness-Adjustable MEMS Force Sensor

Maroufi, Mohammad; Alemansour, Hamed; Moheimani, S. O. Reza

doi:10.1109/jmems.2020.2983193

Cited by 12 publications

(9 citation statements)

References 36 publications

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“…The MEMS-CLFS comprises a shuttle beam with a probe at its extremity actuated by two sets of electrostatic actuators that are used for the closedloop operation of the device. In 20 we detailed the characterization procedure of these electrostatic actuators. The induced displacement on the shuttle beam is amplified by a leverage mechanism with an amplification ratio of 2.5 before it is measured by the embedded electrothermal displacement sensor.…”

Section: Mems-clfs Fabricationmentioning

confidence: 99%

“…The induced displacement on the shuttle beam is amplified by a leverage mechanism with an amplification ratio of 2.5 before it is measured by the embedded electrothermal displacement sensor. The structure of this electrothermal displacement sensor is detailed in 20 . By amplifying the shuttle beam's motion, the displacement measurement resolution is enhanced.…”

Section: Mems-clfs Fabricationmentioning

confidence: 99%

“…This will reduce the mechanical mismatch between the neural interface and the tissue, reducing the long-term damage due to inflammation and the growth of fibrotic tissue within the nerve-interface space. Recently we described the design and characterization of a bidirectional MEMS-based closed-loop force sensor (MEMS-CLFS) with a high force sensing range resolution (−211.7 μN to 211.5 μN), and dynamic range (92.9 dB) 20 . The MEMS-CLFS technology consists of an on-chip electrothermal displacement sensor and electrostatic actuators.…”

Section: Introductionmentioning

confidence: 99%

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Biomechanics Characterization of Autonomic and Somatic Nerves by High Dynamic Closed-Loop MEMS force sensing

González-González

Alemansour

Maroufi

et al. 2023

Preprint

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The biomechanics of peripheral nerves are determined by the blood-nerve barrier (BNB), together with the epineural barrier, extracellular matrix, and axonal composition, which maintain structural and functional stability. These elements are often ignored in the fabrication of penetrating devices, and the implant process is traumatic due to the mechanical distress, compromising the function of neuroprosthesis for sensory-motor restoration in amputees. Miniaturization of penetrating interfaces offers the unique opportunity of decoding individual nerve fibers associated to specific functions, however, a main issue for their implant is the lack of high-precision standardization of insertion forces. Current automatized electromechanical force sensors are available; however, their sensitivity and range amplitude are limited (i.e. mN), and have been tested only in-vitro. We previously developed a high-precision bi-directional micro-electromechanical force sensor, with a closed-loop mechanism (MEMS-CLFS), that while measuring with high-precision (−211.7μN to 211.5μN with a resolution of 4.74nN), can be used in alive animal. Our technology has an on-chip electrothermal displacement sensor with a shuttle beam displacement amplification mechanism, for large range and high-frequency resolution (dynamic range of 92.9 dB), which eliminates the adverse effect of flexural nonlinearity measurements, observed with other systems, and reduces the mechanical impact on delicate biological tissue. In this work, we use the MEMS-CLFS for in-vivo bidirectional measurement of biomechanics in somatic and autonomic nerves. Furthermore we define the mechanical implications of irrigation and collagen VI in the BNB, which is different for both autonomic and somatic nerves (~ 8.5-8.6 fold density of collagen VI and vasculature CD31+ in the VN vs ScN). This study allowed us to create a mathematical approach to predict insertion forces. Our data highlights the necessity of nerve-customization forces to prevent injury when implanting interfaces, and describes a high precision MEMS technology and mathematical model for their measurements.

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Section: Mems-clfs Fabricationmentioning

confidence: 99%

Section: Mems-clfs Fabricationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Biomechanics Characterization of Autonomic and Somatic Nerves by High Dynamic Closed-Loop MEMS force sensing

González-González

Alemansour

Maroufi

et al. 2023

Preprint

Self Cite

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“…Although a sizeable nonlinear behaviour usually accompanies instability, the benefit of sensitivity and quality overwhelms the disadvantage. Electrostatically actuated MEMS resonators have been designed to detect forces [31], masses [32], and accelerations [30,33]. The issue of stabilizing the response in the nonlinear regime has been widely studied.…”

Section: Introductionmentioning

confidence: 99%

A multi-sensing scheme based on nonlinear coupled micromachined resonators

et al. 2023

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A new multi-sensing scheme via nonlinear weakly coupled resonators is introduced in this paper, which can simultaneously detect two different physical stimuli by monitoring the dynamic response around the first two lowest modes. The system consists of a mechanically coupled bridge resonator and cantilever resonator. The eigenvalue problem is solved to identify the right geometry for the resonators to optimize their resonance frequencies based on mode localization in order to provide outstanding sensitivity. A nonlinear equivalent model is developed using the Euler–Bernoulli beam theory while accounting for the geometric and electrostatic nonlinearities. The sensor's dynamics are explored using a reduced-order model based on two-mode Galerkin discretization, which reveals the richness of the response. To demonstrate the proposed sensing scheme, the dynamic response of the weakly coupled resonator is investigated by tuning the stiffness and mass of the bridge and cantilever resonators, respectively. With its simple and scalable design, the proposed system shows great potential for intelligent multi-sensing detection in many applications.

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“…A capacitive force sensor with double sets of comb actuators has been developed [30], the device has a high force sensing sensitivity of 8.43 V/µN and resolution of 0.3450 nN, but its force measurement range was highly limited within 21.4 nN. Besides, complicated control circuits [31,32] and precise parameters estimation [33,34] are necessary to obtain a propel driving signal in these closed-loop position-feedback measurement approaches.…”

Section: Introductionmentioning

confidence: 99%