A high compatibility SiOCN coating on stainless steel

Choi, Hyeon Joon; Lu, Kathy

doi:10.1007/s10853-023-08252-6

Cited by 8 publications

(6 citation statements)

References 50 publications

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“…There was a trace amount of oxygen discovered, which is an impurity in the deposition chamber. The presence of oxygen causes SiOCN which is again compatible with stainless steel [46]. The formation of stable SiC2N2-Si2CN4 phases which was predicted theoretically using crystal symmetry first principles has been recently reported to have been observed experimentally [39,40].…”

Section: X-ray Analysismentioning

confidence: 72%

Raman Analysis of Deposition Pressure Variations in Nanocomposite SiCN Coatings: A 4-Stage Model

Bhattacharyya

2024

Preprint

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Polymer-derived ceramic (PDC) based coatings like Si-C-N and their derivatives are gaining importance day by day in N/MEMS and aerospace due to their thermos-mechanical stability and conductivity. The crystallized, amorphous, and near amorphous morphology of SiCN nanocomposite coatings based on deposition conditions requires thorough investigation for appropriate utilization as they lead to differences in mechanical properties (quantified using nanoindentation in this case). A 4-stage model was proposed based on Raman spectroscopy due to the N2-Ar pressure variations during the deposition process of SiCN coatings by magnetron sputtering. The integral intensity of the G (graphitic), disorder (D), and tetrahedral (T) peaks namely IG, ID, and IT were calculated after the deconvolution of the spectra. The sp2 domain size and defect parameters were evaluated and correlated with the hardness and different bond formation involving Si, C, and N. Image analysis revealed the atomic migration involved during the growth process leading to crystallization along with the formation of voids and defects. The observations were supported by FTIR and TEM-SAED analysis. The outcomes provide a foundation causing an urge to develop similar models with further elemental additions and correlate with various physical properties.

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Section: X-ray Analysismentioning

confidence: 72%

Raman Analysis of Deposition Pressure Variations in Nanocomposite SiCN Coatings: A 4-Stage Model

Bhattacharyya

2024

Preprint

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“…The increased substrate temperature also promotes SiO x formation. 24 The total scratch region can be divided mainly into three regimes, starting with the micro-ductile having a smooth groove followed by the micro-cracking region which has been captured in Figure 3(a) showing the subsurface lateral and radial cracks. Evidence of any ductile failure cannot be seen in this region and there was also no evidence of any major delamination or buckling to have taken place indicating good adhesion.…”

Section: Sliding Indentationmentioning

confidence: 99%

Ductile–brittle indentation fracture transitions in hard coatings

Bhattacharyya,

Rajak,

Bhattacharyya

2024

Surface Engineering

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The article has provided a novel way of finding the probability of fracture ( Pf) based on modifications of some established concepts. It has also discussed ductile to brittle as well as brittle to ductile transitions in the same coating/substrate system subject to differences in crystallisation, indenter sharpness, sliding modes and dislocation kinetics. The indentation positioning and nanocrystalline features cause ambiguity in the results and need meticulous analysis. As a result of increased dislocation movement, the crystalline portions toughened in contrast to the amorphous parts, which were more brittle. The Pf, which varies and reaches a maximum of 52% in the amorphous or near-amorphous area, was calculated using the Weibull distribution. Transitions between ductility and brittleness can be seen in sliding indentations. Evidence of adhesive failure, which required better coating component inspection because it happened significantly earlier, was shown. Finite-element modelling was used to analyse the stress and provide information on dislocation motions and the impact of indenter shape on fracture. The outcomes are advantageous for the production of devices based on nano/micro-electro-mechanical systems.

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“…The SiCN was found to have very high hardness and abrasion resistance and was also found to be compatible with stainless steel. It has also been reported to show both metallic and piezoelectric properties and is a good alternative to SiC which only has insulating properties [17][18][19][20]. SiCN As with other hard coatings, nanoindentation is used to determine its mechanical properties.…”

Section: Introductionmentioning

confidence: 99%

Nano mechanics in multicomponent hard coatings for MEMS cantilevers

BHATTACHARYYA

2024

Preprint

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Ti-B-Si-C-B-N/Si coatings are VLSI compatible at a cheaper rate. These multi-component nanocomposite coating comprising of a mixture of different phases viz., TiN, TiB2, cBN, Ti-C, Si3N4, β-C3N4 and different hybridized carbon grown over an amorphous phase has also been useful for MEMS as microgrippers dielectric barriers in VLSI fabrication and interconnects. The nature of crystallization which occurred on the surface of magnetron sputtered Ti-B-Si-C(N) and Si-C-N on silicon (100) substrates was studied using Transmission electron Microscopy and the complex crystalline configuration was attempted to analyze using image analysis and diffraction patterns. The standard deviations occurring in the nanoindentation P-h plots were put into effect to explain the small-scale fractural features during the indentation process. The electrical conduction associated with nanoindentation indenter tip with the diverse crystalline morphology of the magnetron deposited coatings which involves indenter sharpness and small-scale fracture as well has also been studied to the effect of its use for device fabrication.

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A high compatibility SiOCN coating on stainless steel

Cited by 8 publications

References 50 publications

Raman Analysis of Deposition Pressure Variations in Nanocomposite SiCN Coatings: A 4-Stage Model

Raman Analysis of Deposition Pressure Variations in Nanocomposite SiCN Coatings: A 4-Stage Model

Ductile–brittle indentation fracture transitions in hard coatings

Nano mechanics in multicomponent hard coatings for MEMS cantilevers

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