A Heuristic Load Balancing Scheduling Method for Dedicated Machine Constraint

Shr, Arthur M. D.; Liu, Alan; Chen, Peter P.

doi:10.1007/11779568_81

Cited by 6 publications

(3 citation statements)

References 15 publications

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“…The FSS uses the Resource Schedule and Execution Matrix (RSEM) [4,5,6,7,8,9] to manipulate the scheduling process. The fuzzy scheduling model is presented in this Section…”

Section: Fuzzy Scheduling Systemmentioning

confidence: 99%

A Fuzzy Scheduling System for Dedicated Machine Constraint

Shr¹,

Liu²,

Cheng³

2006

Proceedings of the 9th Joint International Conference on Information Sciences (JCIS-06)

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In this paper, we propose the Fuzzy Scheduling System (FSS) to deal with the dedicated machine constraint. The constraint of having a dedicated machine for photolithography process is the new issue introduced in photolithography machinery due to natural bias. If we randomly schedule the wafer lots to arbitrary photolithography machines at the first photolithography stage, then the load of all photolithography machines might become unbalanced. It is the main contributor to the complexity and uncertainty of the semiconductor factory. The FSS is to select the best photolithograph machines for each wafer lot at the first, unconstrained, stage to tackle this dedicated machine constraint and to maintain the load balancing among photolithography machines.

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“…The FSS uses the Resource Schedule and Execution Matrix (RSEM) [4,5,6,7,8,9] to manipulate the scheduling process. The fuzzy scheduling model is presented in this Section…”

Section: Fuzzy Scheduling Systemmentioning

confidence: 99%

A Fuzzy Scheduling System for Dedicated Machine Constraint

Shr¹,

Liu²,

Cheng³

2006

Proceedings of the 9th Joint International Conference on Information Sciences (JCIS-06)

Self Cite

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show abstract

“…We have proposed the heuristic Load Balancing (LB) scheduling (Shr et al, 2006a) (Shr et al, 2006b) (Shr et al, 2006c) and Multiagent Scheduling System (MSS) (Shr, et al 2006d) approaches to provide solutions to the issue of dedicated photolithography machine constraint. The dedicated photolithography machine constraint, which is caused by the natural bias of the photolithography machine, is a new challenge in the semiconductor manufacturing systems.…”

Section: Introductionmentioning

confidence: 99%

Scheduling for Dedicated Machine Constraint

Shr¹,

Chen²,

Liu³

2007

Multiprocessor Scheduling, Theory and Applications

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“…In this paper, motivated by the issue described above, we propose a Load Balancing (LB) scheduling approach based on the Resource Schedule and Execution Matrix (RSEM) developed in our previous research work (Shr, 2006a) (Shr, 2006b) (Shr, 2006c) to tackle the dedicated machine constraint and load balancing issue.…”

Section: Introductionmentioning

confidence: 99%