2021
DOI: 10.1109/jsen.2021.3086107
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A Gold Diaphragm-Based Fabry-Perot Interferometer With a Fiber-Optic Collimator for Acoustic Sensing

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Cited by 27 publications
(14 citation statements)
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“…Up to date, most of membrane-based fiber optic acoustic sensor schemes usually focus on the optical fiber structure [17][18][19][20] or the material and size of membrane [18,[21][22][23]; meanwhile, the stress exerted on the membrane is neglected, which is also a crucial parameter affecting the response characteristics of sensors [24,25]. Since accurately controlling membrane stress is challenging during the fabrication process of membrane-based acoustic sensors, a few investigations and experiments have revealed the influence law of stress on the response mechanism of fiber optic acoustic sensors [24,26,27], which results in unstable and inconsistent response characteristics between different acoustic sensors.…”
Section: Introductionmentioning
confidence: 99%
“…Up to date, most of membrane-based fiber optic acoustic sensor schemes usually focus on the optical fiber structure [17][18][19][20] or the material and size of membrane [18,[21][22][23]; meanwhile, the stress exerted on the membrane is neglected, which is also a crucial parameter affecting the response characteristics of sensors [24,25]. Since accurately controlling membrane stress is challenging during the fabrication process of membrane-based acoustic sensors, a few investigations and experiments have revealed the influence law of stress on the response mechanism of fiber optic acoustic sensors [24,26,27], which results in unstable and inconsistent response characteristics between different acoustic sensors.…”
Section: Introductionmentioning
confidence: 99%
“…Membranes with thin thickness and high mechanical strength are crucial for exploring highly sensitive optical microphones. In the literature, various materials have been researched as membrane candidates, including metals [21][22][23], polymers [24], and graphene [25,26]. However, acoustic performance is often hindered by residue stress introduced during fabrication or radial stretching of the membrane in response to external pressure.…”
Section: Introductionmentioning
confidence: 99%
“…It is necessary to achieve high-quality voice communication in environments that have high temperatures, high pressure, strong radiation and strong electromagnetic effects. These environments create difficulties for conventional electroacoustic sensors and cause them not to work properly [ 1 ]. External Fabry–Perot interferometric (EFPI) acoustic sensors are widely used in special fields such as national defense and security [ 2 ], marine acoustic monitoring and positioning [ 3 ] and fuel pipeline leakage and positioning [ 4 ] because of their passive detection end, anti-electromagnetic interference, low loss, corrosion resistance and long-distance capabilities [ 5 , 6 , 7 ].…”
Section: Introductionmentioning
confidence: 99%