A glass reflowed microlens array on a Si substrate with rectangular through-holes

Lee, Sung‐Kil; Kim, Man-Geun; Jo, Kyoung-Woo; Shin, Sang-Mo; Lee, Jong‐Hyun

doi:10.1088/1464-4258/10/4/044003

Cited by 27 publications

(11 citation statements)

References 9 publications

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“…These techniques provide high-quality micro-optics systems, however they require very specific and sophisticated working conditions; what increase their cost. Laser direct-writing is in general not currently able to produce microlenses with comparable imaging and stray light properties as those methods, but has advantages in other aspects that can be of significant practical importance, including flexibility in terms of surface shapes, diameter, and focal length; the very small dead space between lens let of any desired shape and profile; and the simplicity of the fabrication setup [11][12][13][14][15].…”

Section: Introductionmentioning

confidence: 99%

Improvement of the optical and morphological properties of microlens arrays fabricated by laser using a sol–gel coating

Nieto

Gómez‐Varela

Martín

et al. 2015

Applied Surface Science

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Section: Introductionmentioning

confidence: 99%

Improvement of the optical and morphological properties of microlens arrays fabricated by laser using a sol–gel coating

Nieto

Gómez‐Varela

Martín

et al. 2015

Applied Surface Science

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“…They are used in various applications like fibre couplers in optical communications systems, viewing optics, laser beam shaping elements, charge-coupled device cameras, to mention a few [1][2][3]. There are many different methods to produce microlenses, such as thermal reflow forming, stereolithography technique, mould insert, pressure difference or decompression method, hot embossing; many techniques rely on fabricate microlenses using photoresists [4][5][6]. The ability to fabricate microlenses directly on glass remains a key challenge.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of microlens arrays on soda-lima glasses with a Nd:YVO 4 laser

et al. 2011

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We present a laser direct-write technique that is capable of providing microlens arrays on soda-lime glass substrate from one step ablation process, permitting one to shorten the typical times of microlens fabrication with other direct-writing techniques. The technique is based on the combination of a Q-switched Nd:YVO 4 laser and a galvanometer system for addressing the output beam laser. The geometrical and optical parameters of the microlenses have been measured to characterize the microlens arrays produced on an area of 2 mm×2 mm. Focal length values around 118 μm have been obtained by measuring the sag and the diameter of the microlens with a confocal microscope (nondirect method) or directly, using a microscope objective with a CCD camera. The practicality of both methods is shown in the good agreement between the obtained results for the focal length of microlenses. By using a noncontact profilometer, the surface roughness of the microlens has been measured and compared with that of a glass substrate.

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“…In such packaging, a ball lens is one of the crucial elements relaying light between the edgeemitting components. To date, various ways of producing a micro lens at wafer-level such as thermal reflow of photoresist [4], glass [5], sol-gel glass [6], vacuum-reflow of glass [7], or molding [8,9], have been reported. However, most of these methods produce hemispherical lenses relaying light normal to the wafer, in other words, to surface-sensitive devices such as PDs (photodiode) or VCSELs (vertical cavity surface emitting laser) that are attached to the wafer.…”

Section: Introductionmentioning

confidence: 99%

“…However, glass provides better mechanical, thermal, and chemical properties than the polymer. Therefore, various attempts to produce glass micro-lenses have been studied, although most of these methods produce hemispherical lenses [5][6][7][8][9]. Still, the mushroom-shaped or nearly spherical glass lens has not been reported, especially, for wafer-level application.…”

Section: Introductionmentioning

confidence: 99%

Wafer-level Fabrication of Ball Lens by Cross-cut and Reflow of Wafer-bonded Glass on Silicon

Lee

et al. 2010

Journal of the Optical Society of Korea

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Novel wafer-level fabrication of a glass ball-lens is realized for optoelectronic applications. A Pyrex wafer is bonded to a silicon wafer and cross-cut into a square-tile pattern, followed by wet-etching of the underlying silicon. Cubes of Pyrex on the undercut silicon are then turned into ball shapes by thermal reflow, and separated from the wafer by further etching of the silicon support. Radial variation and surface roughness are measured to be less than ±3 ㎛ and ±1 nm, respectively, for ball diameter of about 500 ㎛. A surface defect on the ball that is due to the silicon support is shown to be healed by using a silicon-optical-bench. Optical power-relay of the ball lens showed the maximum efficiency of 65% between two single-mode fibers on the silicon-optical-bench.

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A glass reflowed microlens array on a Si substrate with rectangular through-holes

Cited by 27 publications

References 9 publications

Improvement of the optical and morphological properties of microlens arrays fabricated by laser using a sol–gel coating

Improvement of the optical and morphological properties of microlens arrays fabricated by laser using a sol–gel coating

Fabrication of microlens arrays on soda-lima glasses with a Nd:YVO 4 laser

Wafer-level Fabrication of Ball Lens by Cross-cut and Reflow of Wafer-bonded Glass on Silicon

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