A generic design optimization framework for semiconductor cleanroom air-conditioning systems integrating heat recovery and free cooling for enhanced energy performance

Zhao, Wenxuan; Li, Hangxin; Wang, Shengwei

doi:10.1016/j.energy.2023.129600

Energy

2024

DOI: 10.1016/j.energy.2023.129600

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A generic design optimization framework for semiconductor cleanroom air-conditioning systems integrating heat recovery and free cooling for enhanced energy performance

Wenxuan Zhao,

Hangxin Li,

Shengwei Wang

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Cited by 4 publications

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Control-oriented thermal model and load identification for circulating cooling water system in precision process applications

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Zhang,

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et al. 2024

Applied Thermal Engineering

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Economic, environmental, energy, exergy (4E) analysis and simulated annealing algorithm optimization of dividing-wall column-intensified heterogeneous azeotropic pressure-swing distillation process

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Ye,

et al. 2024

Energy

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Achieving high-precision supply air temperature in cleanrooms: Modeling and validation of air–water heat exchange process

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Zhang,

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et al. 2024

International Journal of Heat and Mass Transfer

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A generic design optimization framework for semiconductor cleanroom air-conditioning systems integrating heat recovery and free cooling for enhanced energy performance

Cited by 4 publications

References 22 publications

Control-oriented thermal model and load identification for circulating cooling water system in precision process applications

Control-oriented thermal model and load identification for circulating cooling water system in precision process applications

Economic, environmental, energy, exergy (4E) analysis and simulated annealing algorithm optimization of dividing-wall column-intensified heterogeneous azeotropic pressure-swing distillation process

Achieving high-precision supply air temperature in cleanrooms: Modeling and validation of air–water heat exchange process

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