A Generation solving Layout Decomposition Method for DSA-MP Hybrid Lithography

Zhang, Tao; Zhou, Hengyu; Li, Sikun; Xiong, Shenglin; Wang, Xiangzhao

doi:10.1109/iwaps57146.2022.9972300

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2023

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“…As for graph-based approaches, Zhang et al proposed a weighted generational solving algorithm based on graph growing and a specific backtracking strategy to solve the simultaneous template optimization and mask assignment problem. 7 Badr et al proposed a two-stage heuristic method that scales to dense full-chip designs. 8 They assumed that maximizing the chance of grouping can maximize the possibility of being able to fix conflicts by DSA grouping.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Multiple patterning via layout decomposition method for directed self-assembly lithography

Zhang,

Zhou,

Xiong

et al. 2023

J. Micro/Nanopattern. Mats. Metro.

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Section: Introductionmentioning

confidence: 99%

“…As for graph-based approaches, Zhang et al. proposed a weighted generational solving algorithm based on graph growing and a specific backtracking strategy to solve the simultaneous template optimization and mask assignment problem 7 . Badr et al.…”

Section: Introductionmentioning

confidence: 99%