A Gas Sensor Design and Heat Transfer Simulation with ZnO and TiO2 Sensing Layers

Abstract

Micro Electro-Mechanical System (MEMS) based devices offer innovative approaches in sensor technologies with the advantages of high efficiency and miniaturization. The most important stage in the development of new generation MEMS-based devices is the design and optimization stage. However, device design and optimization processes are developed in a laboratory by empirical approaches. This causes time loss and creates an unnecessary waste of resources. In this study, it is aimed to design and analyze two gas sensors based on ZnO and TiO2 sensing layers. Electro-thermal analysis of the sensor structure was carried out at room temperature and high temperature (294,15K-573,15K) and heat transfer parameters were compared. According to the simulation results, it is obtained that, as the applied temperature increases to the sensor, the temperature over the sensing layer increases linearly. It is compatible with the literature. The temperature on the ZnO surface increases to three times the TiO2 surface temperature. The heat transfer results obtained will be used as a guide for device design and optimization in future works. In this way, as a result of numerical analysis, a MEMS-based device will be produced with high accuracy. Thus, time and resources will be saved.

Enhancing Gas Sensing Performance of TiO2-ZnO nanostructures: Effect of ZnO Concentration

“…As smart sensors, sensors made using microtechnologies offer benefits in terms of cost, compactness, and sensitivity. Gas detection devices, in this perspective, are crucial for a variety of applications, including monitoring gas buildup, medical diagnostics, food quality assurance, and the safety of industrial or residential activities [2,3]. The characteristics of the sensing material have an impact on sensor specifications including sensitivity, selectivity, response, and recovery times.…”