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2008
DOI: 10.1016/j.jpowsour.2008.08.061
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A fully integrated microbattery for an implantable microelectromechanical system

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Cited by 52 publications
(31 citation statements)
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“…One of the major challenges in the microbattery field is related to the manufacturing process and its compatibility with the integrated circuit technology [23][24]. Typical thin-film processing requires high temperature (500-900°C), and masking and etching incompatible with chip materials and packages.…”
Section: -Integrated Mlibsmentioning
confidence: 99%
“…One of the major challenges in the microbattery field is related to the manufacturing process and its compatibility with the integrated circuit technology [23][24]. Typical thin-film processing requires high temperature (500-900°C), and masking and etching incompatible with chip materials and packages.…”
Section: -Integrated Mlibsmentioning
confidence: 99%
“…Most of the previous work in this field has been focusing on processing and communication capabilities. For example, nano processors and storage [3] have been proposed but also work was done on nano batteries [4]. Our key focus is, of course, on nano communication concepts.…”
Section: Nano Communication Conceptsmentioning
confidence: 99%
“…In the case of microelectronics, the use of lithium-ion batteries requires miniaturized integrated units. Lithium-ion (micro-)batteries with solid electrolytes can be prepared via high temperature processing techniques; they are, however, limited in power density [4][5][6][7][8]. Alternatively, one may consider miniaturized batteries with liquid electrolytes [9,10]; these systems may provide pulsed currents as high as 100 mA cm −2 .…”
Section: Introductionmentioning
confidence: 99%