A fully-implicit Particle-In-Cell Monte Carlo Collision code for the simulation of inductively coupled plasmas

Mattei, S.; Nishida, Kazuhiro; Onai, M.; Lettry, J.; Tran, M. Q.; Hatayama, A.

doi:10.1016/j.jcp.2017.09.015

Cited by 44 publications

(26 citation statements)

References 38 publications

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“…Although recently the numerical code has been improved and speeded up with full implicit numerical scheme [97], it is still too massive for such full-kinetic 2.5D EM-PIC-MCC modeling to take into account directly the effect of the matching circuits or to couple directly with the model of the matching network system mainly from the viewpoint of the computational cost at least at present.…”

Section: Model Validation: Comparisons With Experimentsmentioning

confidence: 99%

Present status of numerical modeling of hydrogen negative ion source plasmas and its comparison with experiments: Japanese activities and their collaboration with experimental groups

et al. 2018

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The present status of kinetic modeling of particle dynamics in hydrogen negative ion (H − ) source plasmas and their comparisons with experiments are reviewed and discussed with some new results. The main focus is placed on the following topics, which are important for the research and development of H − sources for intense and high-quality H − ion beams: (i) effects of non-equilibrium features of electron energy distribution function on volume and surface H − production, (ii) the origin of the spatial non-uniformity in giant multi-cusp arc-discharge H − sources, (iii) capacitive to inductive (E to H) mode transition in radio frequency-inductively coupled plasma H − sources and (iv) extraction physics of H − ions and beam optics, especially the present understanding of the meniscus formation in strongly electronegative plasmas (so-called ion-ion plasmas) and its effect on beam optics. For these topics, mainly Japanese modeling activities, and their domestic and international collaborations with experimental studies, are introduced with some examples showing how models have been improved and to what extent the modeling studies can presently contribute to improving the source performance. Close collaboration between experimental and modeling activities is indispensable for the validation/improvement of the modeling and its contribution to the source design/development. chamber wall (anode) and filaments (cathode). In the latter sources, the RF-electromagnetic field is used to generate and heat plasmas.In this review, we mainly focus on the modeling studies, especially the modeling study of H − source plasmas using kinetic approaches, such as the test particle Monte-Carlo model [14] and particle in cell (PIC) model [14,15], which has been reviewed in [16]. Here, we extend it with some new results. Close collaboration between the experimental and modeling study is very important as it can improve our basic understanding of source plasmas. Various examples of the model validation will be shown through comparisons with experiments and also how modeling studies contribute to the improvement of source performances.As for the multi-cusp arc-discharge source, we will first show a systematic study to help us understand the role of the EEDF on the H − VP in section 2.2. The study has been carried out for a compact multi-cusp arcdischarge source (SHI H − source: Sumitomo Heavy Industry H − source [17,18]) for medical application such as boron neutron capture therapy and the radioisotope production for molecular imaging technology.The SHI H − source is a typical tandem type H − source [19]. In such a tandem type volume sources, the plasma source volume is divided into two regions by the transverse magnetic field (the so-called magnetic filter filed: MF-field) to control the EEDFs and to promote the two step H − VP reactions explained above. Namely, the source volume consists of two regions: (1) the 'driver region' where the electron energy is high and the EV process is promoted, and (2) the 'extraction region' where the electr...

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Section: Model Validation: Comparisons With Experimentsmentioning

confidence: 99%

Present status of numerical modeling of hydrogen negative ion source plasmas and its comparison with experiments: Japanese activities and their collaboration with experimental groups

et al. 2018

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“…NINJA is a fully implicit electromagnetic particle-in-cell Monte Carlo collision (EM-PIC-MCC) code designed for the simulation of RF-ICPs in cylindrical configuration. A detailed description can be found in [14], therefore only a brief summary is given here. The code is composed of three modules: an EM-PIC module for the solution of the EM field and the motion of charged particles, a MCC module taking into account the collision processes between the different species, and a neutral transport module aimed at tracking atomic and molecular species (the ground state of H 2 vibrationally resolved).…”

Section: The Ninja Codementioning

confidence: 99%

“…The MCC module includes a database of over 200 cross sections taking into account the most important processes in hydrogen plasmas (e. g. elastic collisions, ionization, electronic and vibrational excitation via collisions, see [14] for details and references). Electron-neutral, electron-ion and ion-neutral collisions are handled by a null-collision method [28] while Coulomb collisions are treated according to the binary method [29].…”

Section: The Ninja Codementioning

confidence: 99%

“…They can be accessed more easily via spatially resolved simulations of the discharge dynamics. For the Linac4 H − source, the electromagnetic particle-in-cell Monte Carlo collision code NINJA [14] has been developed for this purpose. The code simulates the inductive RF heating of the discharge and tracks the particle motion in 3D3V (details are given in section 3).…”

Section: Introductionmentioning

confidence: 99%

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Experimental benchmark of the NINJA code for application to the Linac4 H⁻ion source plasma

et al. 2017

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“…These parameters and variables can be thermodynamic, fluid, or electromagnetic. An example of the model based on PIC-MCS is described by Mattei et al [31] for simulation of electromagnetic particle-in-cell collision in inductively coupled plasmas. Several works can be found in the literature on this same line of work.…”

Section: Other Large Methods Of Monte Carlo Simulationmentioning

confidence: 99%

How to Use the Monte Carlo Simulation Technique? Application: A Study of the Gas Phase during Thin Film Deposition

Khelfaoui¹,

Babahani²

2019

Theory, Application, and Implementation of Monte Carlo Method in Science and Technology

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Many physical phenomena can be modeled using Monte Carlo simulation (MCS) because it is a powerful tool to study thermodynamic properties. MCS can be used to simulate interactions between several particles or bodies in the presence of local or external fields. The main idea is to create a high number of different random configurations; statistics can be taken according to appropriate algorithms (Metropolis algorithm). In this chapter, we present basic techniques of MCS as the choice of potential, reaction rates, simulation cell, random configurations, and algorithms. We present some principal ideas of MCS used to study particle-particle collisions in the gas and in plasmas. Other MCS techniques are presented briefly. A numerical application is presented for collisions in gas phase during thin film deposition by plasmaenhanced chemical vapor deposition (PECVD) processes. Parameters and results of the simulation are studied according to a chosen reactor and mixture.

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A fully-implicit Particle-In-Cell Monte Carlo Collision code for the simulation of inductively coupled plasmas

Cited by 44 publications

References 38 publications

Present status of numerical modeling of hydrogen negative ion source plasmas and its comparison with experiments: Japanese activities and their collaboration with experimental groups

Present status of numerical modeling of hydrogen negative ion source plasmas and its comparison with experiments: Japanese activities and their collaboration with experimental groups

Experimental benchmark of the NINJA code for application to the Linac4 H⁻ion source plasma

How to Use the Monte Carlo Simulation Technique? Application: A Study of the Gas Phase during Thin Film Deposition

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A fully-implicit Particle-In-Cell Monte Carlo Collision code for the simulation of inductively coupled plasmas

Cited by 44 publications

References 38 publications

Present status of numerical modeling of hydrogen negative ion source plasmas and its comparison with experiments: Japanese activities and their collaboration with experimental groups

Present status of numerical modeling of hydrogen negative ion source plasmas and its comparison with experiments: Japanese activities and their collaboration with experimental groups

Experimental benchmark of the NINJA code for application to the Linac4 H−ion source plasma

How to Use the Monte Carlo Simulation Technique? Application: A Study of the Gas Phase during Thin Film Deposition

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Experimental benchmark of the NINJA code for application to the Linac4 H⁻ion source plasma