2006
DOI: 10.1109/iemt.2006.4456476
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A FPGA-Based Smell Sensing System for Micromachined Gas Sensor Application

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“…Micrograph of micro hotplate is shown in figure 4. Figure 4: Micrograph of micro hotplate before bulk micro machine process [3].…”
Section: Electronic Nosementioning
confidence: 99%
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“…Micrograph of micro hotplate is shown in figure 4. Figure 4: Micrograph of micro hotplate before bulk micro machine process [3].…”
Section: Electronic Nosementioning
confidence: 99%
“…Micro hotplate can be developed using CMOS technology and cavity under the micro hotplate can be developed using bulk micro machine process. Response time of micro hotplate sensor base is between 10 seconds to 120 seconds and the size of one sensor is around 200µm [3]. Micrograph of micro hotplate is shown in figure 4.…”
Section: Electronic Nosementioning
confidence: 99%
See 2 more Smart Citations