A fluxgate magnetic sensor with micro-solenoids and electroplated permalloy cores

Kawahito, Shoji; Sasaki, Yoshi N.; Sato, Hikaru; Nakamura, Tetsurō; Tadokoro, Yoshiaki

doi:10.1016/0924-4247(93)00679-x

Cited by 40 publications

(20 citation statements)

References 7 publications

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“…8(a) V/T) intrinsically can be a factor of 50 higher than the results of [4] and [6] and a factor 4/3 higher than the result of [8]. The fluxgate sensors presented here show that they are suitable for high performance applications.…”

Section: E Dependence On the Frequency Of The Excitation Currentmentioning

confidence: 84%

“…Kawahito et al [4] have shown that upon excitation of the fluxgate sensor by an ac magnetic field with triangular waveform, the Fourier analysis of the induced voltage in the detection coil gives rise to a second harmonic voltage given by (1) where is the number of turns of the detection coil, is the cross-section of the area of the core, the effective relative permeability, and the maximum magnetic induction generated by the excitation current.…”

Section: Dependence On the Air Gapmentioning

confidence: 99%

“…Kawahito et al [4] have fabricated fluxgate sensors with a size of a few mm on Si wafers; they used a multimask technology based on electroplated permalloy cores and microstructured solenoids for the excitation and detection coils. They achieved a sensitivity of 5.8 V/T at 100 kHz and 0.58 V/T at 10 kHz excitation current signals.…”

Section: Introductionmentioning

confidence: 99%

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New hybrid technology for planar fluxgate sensor fabrication

et al. 1999

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Abstract-We have adapted a new printed circuit board (PCB) technology to the fabrication of ultraflat and sensitive fluxgate magnetic field sensors. The two outer layers of the PCB stack compose the electrical windings of fluxgates, while the inner layer is made of a micro-patterned amorphous magnetic ribbon with extremely high relative magnetic permeability ( r 100 000).Two basic configurations were considered: one based on a toroidal magnetic core and the other on a rectangular core with and without an air gap. The field response and sensitivity of the fluxgate devices have been studied as a function of the gap length, the excitation current, and excitation frequency. Compared to fluxgate sensors of similar size, a relatively high sensitivity of 60 V/T was found at 30 kHz for a five-winding detection coil wound around a rectangular E-shaped magnetic core. This high performance is primarily attributable to the high-permeability magnetic core. The results clearly show the potential of this fluxgate device for application as a magnetic sensor.

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Section: E Dependence On the Frequency Of The Excitation Currentmentioning

confidence: 84%

Section: Dependence On the Air Gapmentioning

confidence: 99%

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New hybrid technology for planar fluxgate sensor fabrication

et al. 1999

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“…However, in the micro-fabricated MI elements, the head size is not so different from the micro fluxgate sensor in this paper. Figure 2 shows the basic structure of the proposed fluxgate sensing element based on the silicon process technology and the ferromagnetic films (8). Two-layer metalization process using aluminum forms the shape of the solenoid.…”

Section: Introductionmentioning

confidence: 99%

“…The excitation coil is not integrated on the silicon chip. Authors have developed a first fullyintegrated micro fluxgate sensor which is composed of micro-solenoids for the pickup and the excitation coils and NiFe (permalloy) film formed by electrodeposition (8).…”

Section: Introductionmentioning

confidence: 99%

Micro Fluxgate Magnetic Sensors Using Planar Coils Wrapped around a Film Core.

et al. 1996

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Fabrication Advancements in Integrated Fluxgate Sensors: A Mini Review

2022

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Research on magnetic sensors has been carried out in recent years to enhance sensing capability, enabling us to understand the Earth's magnetic field changes [1] with better sensitivities of 10 À10 to 10 À2 T. [2] Magnetic field sensors have been extensively investigated according to their operating principles and actions in various applications. Sensitivity and selectivity are the two essential properties crucial in the evolution of magnetic field sensors to achieve high fidelity outputs. The former is strengthened by increasing the sensor area and improvements to the planar surface with various Nano-materials. In contrast, the latter is improved by using multiple materials and techniques to enhance interfacial interactions.Magnetic sensors detect disturbances and changes in magnetic fields such as force, direction, and flux. It is a transducer that converts a magnetic field into an electrical voltage. There are several types of magnetic field sensors, each with its own sensitivity range. In addition to sensitivity, the temperature range, the physical size of the sensor, and its on-chip manufacturability must all be considered. Magnetic fields of less than 100 pT are extremely weak and far below the earth's magnetic field. Earth magnetic field sensors have a sensitivity range of 10 μT to a few micro-Tesla, while bias magnet field (high field) sensors have a sensitivity of more than 1 mT.Magnetic fields of less than 100 pT are extremely weak and far below the earth's magnetic field. Earth magnetic field sensors have a sensitivity range of 10 μT to a few micro-Tesla, while bias magnet field (high field) sensors have a sensitivity of more than 1 mT. The most sensitive low-field sensor is the superconducting quantum interference device (SQUID). It is based on Brian J. Josephson's research on a point-contact connection for measuring extremely low currents.The SQUID ring, the radio-frequency coil, and the big antenna loop are all superconducting components of the SQUID sensor. All three must be cooled to the point where they become superconducting. The SQUID itself is small, but the requirement for liquid helium cooling makes the entire apparatus big and hefty. Magnetoresistive sensors (MR) have a high sensitivity, are inexpensive to manufacture, and are small in size. However, they have poor noise performance and linearity, as well as a small dynamic range, making them unappealing and unsuitable for many low-noise applications. Furthermore, as the power usage is reduced, their sensitivity degrades.Search-coil or induction sensors are high-sensitivity, lowpower sensors, but their sensitivity decreases as the cross-section area decreases, making miniaturization ineffective. Because search coils can detect an alternating current magnetic field, they cannot detect a static magnetic field like the Earth's magnetic field. Magnetic sensors based on semiconductors, such as Hall-Effect sensors, magnetotransistors, and magnetodiodes, are very small in size. Because of its low manufacturing cost

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A fluxgate magnetic sensor with micro-solenoids and electroplated permalloy cores

Cited by 40 publications

References 7 publications

New hybrid technology for planar fluxgate sensor fabrication

New hybrid technology for planar fluxgate sensor fabrication

Micro Fluxgate Magnetic Sensors Using Planar Coils Wrapped around a Film Core.

Fabrication Advancements in Integrated Fluxgate Sensors: A Mini Review

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