A flexure-based tool holder for sub-μm positioning of a single point cutting tool on a four-axis lathe

Bono, Matthew; Hibbard, R. L.

doi:10.1016/j.precisioneng.2006.03.007

Cited by 10 publications

(3 citation statements)

References 1 publication

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“…To achieve the required precision of 0.25 µm on each of the ablator components, the cutting tool had to be positioned on the rotary table with an accuracy of approximately 0.1 µm. To facilitate positioning the tool with this level of accuracy, a special tool holder was developed that allowed the tool position to be precisely adjusted [10]. This tool holder incorporates flexure hinges and allows the tool position to be adjusted with 20 nm precision, so it could be set on the rotary table with the required accuracy in a reasonable amount of time.…”

Section: Figure 13 Enlarged Views Of the Step Joint Illustrating A Smentioning

confidence: 99%

Fabrication of Double Shell Targets with a Glass Inner Capsule Supported by SiO₂Aerogel for Shots on the Omega Laser in 2006

Bono

Bennett

Castro

et al. 2007

Fusion Science and Technology

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Indirectly driven double shell implosions are being investigated as a possible noncryogenic path to ignition on the National Ignition Facility. Lawrence Livermore National Laboratory has made several technological advances that have produced double shell targets that represent a significant improvement to previously fielded targets. The inner capsule is supported inside the ablator shell by SiO 2 aerogel with a nominal density of 50 mg/cm 3 . The aerogel is cast around the inner capsule and then machined concentric to it. The seamless sphere of aerogel containing the embedded capsule is then assembled between the two halves of the ablator shell. The concentricity between the two shells has been improved to less than 1.5 µm. The ablator shell consists of two hemispherical shells that mate at a step joint that incorporates a gap with a nominal thickness of 0.1 µm. Using a new flexure-based tool holder that precisely positions the diamond cutting tool on the diamond turning machine, step discontinuities on the inner surface of the ablator of less than 0.5 µm have been achieved. New methods have been used to comprehensively characterize each of the targets using high-resolution x-ray imaging systems.

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Section: Figure 13 Enlarged Views Of the Step Joint Illustrating A Smentioning

confidence: 99%

Fabrication of Double Shell Targets with a Glass Inner Capsule Supported by SiO₂Aerogel for Shots on the Omega Laser in 2006

Bono

Bennett

Castro

et al. 2007

Fusion Science and Technology

Self Cite

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“…In these studies, both serial [4], [8] and parallel [5][6][7], [9] mechanism structures are designed and piezoelectric actuators are often used. Other applications are for example clamping mechanisms for tool holders [10] or part assembling and insertion units [11].…”

Section: Introductionmentioning

confidence: 99%

Compliant joints for the improvement of the dynamic behaviour of a gantry stage with direct drives

Pohlmann¹,

Peukert²,

Merx³

et al. 2020

Journal of Machine Engineering

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Gantry stages, which consist of two parallel acting servo drives, are commonly used in machine tools. One drawback of this concept is the crosstalk between both drives due to the structural coupling that can cause stability issues and therefore limits the bandwidth of the position control. This paper deals with the development of compliant joints to solve the coupling between the drives. When compared to solutions containing bearings, the advantages of such flexible elements are low friction and the absence of backlash. To adjust the properties of the joints, packages of spring-steel-sheets are used as compliant links. One design aspect of the flexible joints is a low stiffness relating to the rotation around one specific axis, but a high stiffness relating to the other degrees of freedom. With this method, the dynamic behaviour of the gantry stage is modified and the bandwidth of the controllers can be increased. Additionally, by releasing the mechanical coupling of the drives, the reaction forces the actuators have to provide can be reduced. Both systems with flexible and with rigid connecting elements, are analysed by measured frequency response functions.

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“…1 Many lathetype ultra precision micromachining machines have been recently introduced in the market, but as the market trends go beyond 10~12 inches panels and the corresponding mold and machine sizes are getting bigger, milling-type ultra precision machines becomes more popular than the lathe-type machines. [2][3][4] Optical micro arrays on large surfaces are one of the most required machining features from ultra precision micromachining machines. To generate micro arrays on large surfaces the ultra precision micromachining machines need additional mechanical characteristics.…”

Section: Introductionmentioning

confidence: 99%

Development of an ultra precision machine tool for micromachining on large surfaces

Park

Song

Hwang

et al. 2009

Int. J. Precis. Eng. Manuf.

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A flexure-based tool holder for sub-μm positioning of a single point cutting tool on a four-axis lathe

Cited by 10 publications

References 1 publication

Fabrication of Double Shell Targets with a Glass Inner Capsule Supported by SiO₂Aerogel for Shots on the Omega Laser in 2006

Fabrication of Double Shell Targets with a Glass Inner Capsule Supported by SiO₂Aerogel for Shots on the Omega Laser in 2006

Compliant joints for the improvement of the dynamic behaviour of a gantry stage with direct drives

Development of an ultra precision machine tool for micromachining on large surfaces

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A flexure-based tool holder for sub-μm positioning of a single point cutting tool on a four-axis lathe

Cited by 10 publications

References 1 publication

Fabrication of Double Shell Targets with a Glass Inner Capsule Supported by SiO2Aerogel for Shots on the Omega Laser in 2006

Fabrication of Double Shell Targets with a Glass Inner Capsule Supported by SiO2Aerogel for Shots on the Omega Laser in 2006

Compliant joints for the improvement of the dynamic behaviour of a gantry stage with direct drives

Development of an ultra precision machine tool for micromachining on large surfaces

Contact Info

Product

Resources

About

Fabrication of Double Shell Targets with a Glass Inner Capsule Supported by SiO₂Aerogel for Shots on the Omega Laser in 2006

Fabrication of Double Shell Targets with a Glass Inner Capsule Supported by SiO₂Aerogel for Shots on the Omega Laser in 2006