A flexible platform for simulations of sputtering hollow cathode discharges for laser applications

Mihailova, DB Diana; Grozeva, M.; Hagelaar, Gerjan; Dijk, van J Jan; Brok, Wjm Wouter; Mullen, van der Jjam Joost

doi:10.1088/0022-3727/41/24/245202

Cited by 18 publications

(23 citation statements)

References 34 publications

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“…The uid model calculates the spatial density distribution of various discharge species, the mean electron energy and the electrostatic potential. The results of the MD2D model are found to agree well with experimental and analytical observation [3,4,5].…”

Section: Introductionsupporting

confidence: 80%

“…The focus of this work is modelling the processes in the plasma of a HCD. For this purpose we use the PLASIMO modelling platform [2], on which the HCD was already simulated by the MD2D model [3] -a time dependent two-dimensional multi uid model. The uid model calculates the spatial density distribution of various discharge species, the mean electron energy and the electrostatic potential.…”

Section: Introductionmentioning

confidence: 99%

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Monte Carlo simulation of electron kinetics in a hollow cathode discharge

Karatodorov

Mihailova

Dijk

et al. 2012

J. Phys.: Conf. Ser.

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Section: Introductionsupporting

confidence: 80%

Section: Introductionmentioning

confidence: 99%

Monte Carlo simulation of electron kinetics in a hollow cathode discharge

Karatodorov

Mihailova

Dijk

et al. 2012

J. Phys.: Conf. Ser.

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“…Experimentally, it was observed [11,[16][17][18] that (1) the current density and optical emission decrease along the cathode cylinder axis as a function of distance from the anode; (2) the voltage-current characteristic is very flat but shifted in voltage when the cathode length is changed; (3) these features are rather independent of pressure, gas composition, and metal vapor. In several previous publications [16][17][18], we reproduced these experimental findings by comprehensive two-dimensional numerical simulations. The analytical model presented here aims at interpreting our previous results.…”

Section: Introductionmentioning

confidence: 99%

Analytical model of a longitudinal hollow cathode discharge

Hagelaar¹,

Mihailova²,

Dijk³

2010

J. Phys. D: Appl. Phys.

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This paper presents a simple analytical model of a longitudinal hollow cathode discharge used in metal vapor lasers. The model describes the principle relations between the voltage, current, plasma density, and the axial structure of the discharge. Contrary to standard DC discharges, this discharge does not require electron multiplication in the cathode fall to produce ions, but rather to satisfy the electron energy balance. A self-sustainment condition is obtained from the energy balance per electron-ion pair. From this, it follows that there is a maximum voltage at which the cathode fall thickness tends to zero and the current density tends asymptotically to infinity. The discharge develops axial non-uniformity and an axial electric field in order to evacuate the created electrons to the anode, such that the characteristic time for transport losses is the same for electrons as for ions. The axial profiles of the current density, plasma density, and potential are obtained from the electron continuity equation. It is shown that additional energy absorption from the axial field, similar to electron heating in DC positive columns, modifies the self-sustainment condition and thus leads to a shift in the voltage-current characteristic, depending on the cathode length.Confidential: not for distribution.

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“…It has a cylindrical geometry with two anodes at both sides as described in detail in [1,2]. The hollow cathode metal cylinder is with a length of 50 mm and an inner diameter of 4 mm .…”

Section: Introductionmentioning

confidence: 99%

Towards a reduced chemistry module of a He–Ar–Cu hollow cathode discharge

Mihailova¹,

Dijk²,

Grozeva³

et al. 2011

J. Phys. D: Appl. Phys.

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To cite this version:D Mihailova, J Van Dijk, M Grozeva, G Degrez, A M Van Der Mullen. Towards a reduced chemistry module of a HeArCu hollow cathode discharge. Journal of Physics D: Applied Physics, IOP Publishing, 2011, 44 (19) Abstract. This study is aimed to find a reduced chemistry module for hollow cathode discharge excited in a He-Ar-Cu mixture. This enables to construct lean and realible models that can be used as a part of the design tool of hollow cathode discharges (HCDs). To this end estimative calculations and numerical simulations are performed at optimal conditions for lasing. An analysis of the species behaviour and reactions is made and as a result the model is simplified by means of reducing the number of species and reactions. The consequences of these reductions is justified by comparing the results of the simplified models with those of a more complete one. This study delivers a model that is chemical lean and thus, much less time consuming. It can be used in optimization studies to find the optimum in the plasma control parameter-set of HCDs. The technique developed in this study for HCDs can be applied to glow discharges in general.

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A flexible platform for simulations of sputtering hollow cathode discharges for laser applications

Cited by 18 publications

References 34 publications

Monte Carlo simulation of electron kinetics in a hollow cathode discharge

Monte Carlo simulation of electron kinetics in a hollow cathode discharge

Analytical model of a longitudinal hollow cathode discharge

Towards a reduced chemistry module of a He–Ar–Cu hollow cathode discharge

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