Abstract:We have evaluated the prospects of phosphorus-based compounds in extreme ultraviolet multilayer optics. Boron phosphide (BP) is suggested to be used as a spacer material in reflective multilayer optics operating just above the L-photoabsorption edge of P (λ ≈9.2 nm). Mo, Ag, Ru, Rh, and Pd were considered for applications as reflector materials. Our calculations for multilayer structures with perfect interfaces show that the Pd/BP material combination suggests the highest reflectivity values, exceeding 70% within the 9.2 -10.0 nm spectral range. We also discuss the potential of fabrication of BP-based multilayer structures for optical applications in the extreme ultraviolet range.
References and links1. E. Spiller, Soft X-ray Optics (SPIE, Bellingham, 1994). 2. J. Larruquert, "Optical properties of thin film materials at short wavelengths," in Optical Thin Films and Coatings, A. Piegari, and F. Flory, eds. (Woodhead Publishing Limited, 2013). 415-417 (2013). 11. The direct application of the solid allotropes of sulphur (S) in multilayer structures is unlikely because of its high reactivity. For that reason instead of pure S some stable S-based compounds were considered for applications in multilayer structures. This is in spite of the fact that in this situation the increased chemical stability is achieved at the expense of the optical performance. Compounds of S with any material have higher absorbance for EUV radiation than that of pure S in the wavelength range where the application of S is favorable. Hence the elements to form compounds with S should be chosen using the two following criteria: 1) high chemical stability of the resulting compound; 2) optical constants of the resulting compound close to those of pure S. The analysis of the CXRO database of the optical constants indicates that the most promising candidates are boron (B), yttrium (Y), zirconium (Zr) and strontium (Sr). Obviously phosphorus-reach compounds are still the most attractive -these are B 2 S 3 , Y 2 S 3 , ZrS 2 and SrS. However B 2 S 3 , Y 2 S 3 and SrS are decomposed by water with the release of toxic H 2 S gas. Hence they do not meet the criterion of stability, and we focused on ZrS 2 . Our calculations for multilayers with ZrS 2 spacer indicate that ZrS 2 -based multilayer structures could only add to the B-based multilayer structures within a narrow 0.3 nm range above the L absorption edge of S.