A Fiber-Free DC-7 GHz 35 W Integrated Semiconductor Plasma Switch

Fisher, Alden; Missen, Zach Vander; Jones, Thomas R.; Peroulis, Dimitrios

doi:10.1109/ims19712.2021.9574823

Cited by 14 publications

(1 citation statement)

References 15 publications

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“…A. Fisher with low insertion loss [15], high linearity [16], and fast switching times [17]. Applications in the literature include switches, variable attenuators, and tunable phase shifters, [13], [18], [19].…”

Section: Introductionmentioning

confidence: 99%

A Photogenerated Silicon Plasma Waveguide Switch and Variable Attenuator for Millimeter-Wave Applications

Jones

Fisher

Barlage

et al. 2021

IEEE Trans. Microwave Theory Techn.

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This paper reports the design, fabrication, and measurement of a millimeter-wave solid-state π-match waveguide switch using bulk silicon micromachining. A photogenerated plasma within a silicon post is utilized as the switching element within the waveguide channel. Not only does this isolate the switch bias network from the RF signal path, but allows for tuning of the OFF-state isolation with increasing optical power for application as a variable attenuator. A measured OFF-state isolation greater than 25 dB up to 40 GHz is reported, with a measured extracted ON-state insertion loss of 0.52 dB at 35 GHz, and less than 0.88 dB across the entire band from 30-40 GHz. The proposed switch illustrates the significant potential for photogenerated silicon plasma switching of high-performance bulk micromachined millimeter-wave waveguides.

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