2009 Fourth International Conference on Innovative Computing, Information and Control (ICICIC) 2009
DOI: 10.1109/icicic.2009.13
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A Fault Detection for a Correlated Process with the Use of SPC/EPC/NN Scheme

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Cited by 12 publications
(21 citation statements)
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“…Since more than 75% of ANN applications use the back-propagation neural network (BPNN), this study employs the BPNN in developing the ANN forecasting model [25]- [28]. In addition, since there is only one variable (i.e., y t , or IECES) available, this study uses two designs for ANN modeling.…”
Section: Ann Modeling Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…Since more than 75% of ANN applications use the back-propagation neural network (BPNN), this study employs the BPNN in developing the ANN forecasting model [25]- [28]. In addition, since there is only one variable (i.e., y t , or IECES) available, this study uses two designs for ANN modeling.…”
Section: Ann Modeling Resultsmentioning
confidence: 99%
“…The hidden nodes were chosen as 22, 23, 24, 25 and 26 for the second design. Since the learning rate of 0.01 is a very effective setting [22], [28], this study sets the values of learning setting as 0.01 for ANN modeling. After performing the ANN modeling, the first design obtained that the {2-6-1} and {2-2-1} structures provided the best results and a minimum testing MAPE for IE and CE sales, respectively.…”
Section:  Nmentioning
confidence: 99%
“…These information are often used to adjust the machine parameters after the event. SPC control charts are important tools to diagnose abnormalities of process [5,16]. Using these charts, engineers can understand the quality of the wafer.…”
Section: Quality Control In Semiconductor Manufacturingmentioning
confidence: 99%
“…When the parameters deviate from the original value, and may be beyond the range of the set interval, this needs to apply the Run-to-Run adjustments to modify the parameters directly and continuously collecting the running parameters of the machine and constant feedbacks [1]. Based on the previous activities of quality control, engineers can adjust the machine parameters to ensure that the production are within normal operations [15][16].…”
Section: Quality Control In Semiconductor Manufacturingmentioning
confidence: 99%
“…Vibrations that result from these dynamic forces affect the desired precision. In rotational actuators, such as the air bearing spindle of ultra-precision machine tools, the dynamic forces produced during rotary movement [11] reflect these uncontrolled dynamics. The increase in dynamic forces, due to the dynamic mass imbalance of the spindle, generates an eccentricity on its rotational axis with its corresponding vibration.…”
Section: Ultra-precision Rotation Devices In Manufacturing Processesmentioning
confidence: 99%