In order to build a motion system with high resolution, fast response, and long travel range in a probe station, a linear ultrasonic motor was investigated as an alternative to the electromagnetic counterpart in a servo system. This work focused on a longitudinal composite-mode linear ultrasonic motor for the motion servo system in a probe station. The motor was designed based on the required specifications. A finite element model was built to analyze the dynamic response of the stator. The influence of the structural parameters on the dynamic performances, i.e., sensitivity parameters, was calculated to analyze the stability of the structure. Based on these analytical works, a prototype of the stator was developed and mode testing was conducted. The experimental results showed that the proposed design was able to achieve respectable performance: Despite the dual-mode design, the frequency difference between the two working modes was minimized to 608 Hz; and the prototype could operate stably under 55.4 kHz, providing a 0.5 N load with 980 mm/s speed.