“…The nanopositioner typically has both linear dynamics due to its mechanical structure and nonlinear hysteresis dynamics due to the piezo-actuator, as shown in our previous work [38,39,40]. Typically, the linear dynamics can be accurately modeled in the frequencydomain via a summation of second-order transfer functions (one for each resonant mode) [41,42,43] while the hysteresis can be modeled via a kind of hysteresis model, such as Bouc-Wen model [44], Prandtl-Islinskii model [45], Preisach model [46].…”