A Dynamic System to evaluate the UV Shrinkage Characteristics of UV Photopolymers used for Nanoimprint

Optically Transparent and Refractive Index-Tunable ZrO2/Photopolymer Composites Designed for Ultraviolet Nanoimprinting

“…nounced volume shrinkage than PAK-01 with ZrO 2 -NPs (4 nm). According to previous reports, 17,24) PAK-01 shows a volume shrinkage of approximately 10% with UV curing. Considering that the silica mold had a height of about 1 m before surface modification with an antisticking reagent, the height of 0.88 m measured for PAK-01 was somewhat small.…”

UV-Nanoimprinting Lithography Photoresists with No Photoinitiator and Low Polymerization Shrinkage

“…A reflective laser scanning system employing an LDS instrument (Keyence LK-G10, Japan) having a sampling speed of 50 kHz (0.02 ms) and measuring accuracy of 0.02 LM was used to monitor the thickness changes of the liquid film having a diameter of 2 mm as well as a thickness of 1.5 mm during the photopolymerization process to determine the corresponding polymerization shrinkage of the photoresist. 29 Before each trial, the liquid resin film was covered by a piece of coverslip to exclude the possible oxygen. A plane UV source equipped with an emitting window of 25 mm × 25 mm and high-pressure mercury lamp of 400 W was used as the light source.…”

Effects of Ultraviolet Intensity and Initial Thickness on Normal Force of Acrylic Ultraviolet Curable Resin

“…In the field of nanoimprint lithography (NIL) technology, understanding the shrinkage phenomenon is crucial for ensuring the accuracy of the final product. Laser displacement sensors have also been used to measure the kinetics of shrinkage during UV-curing [13]. A detaching force from a NIL mold, which may be related to the residual force, has also been measured using a device where a force sensor was attached to the NIL mold [14].…”