A dual step precision multi-DOF stage for maskless digital lithography

Ihn, Yong Seok; Ji, Sang-Hoon; Moon, Hyungpil; Choi, Hyouk Ryeol; Koo, Ja Choon

doi:10.1007/s00542-012-1619-5

Cited by 6 publications

(1 citation statement)

References 22 publications

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“…The micro-positioning stage is considered an important element in modern and future technologies, especially in microand nano-environments. It has been widely used in various applications such as in atomic force microscopy [1], scanning microscopic interferometry [2], micro-and nano-surgical tools [3], maskless lithography [4], and scanning probe microscopy [5]. In addition, many other micro-and nanopositioning stage applications have also been reported in [6][7][8].…”

Section: Introductionmentioning

confidence: 99%

Design and fabrication of a novel XYθz monolithic micro-positioning stage driven by NiTi shape-memory-alloy actuators

AbuZaiter

Hikmat

Nafea

et al. 2016

Smart Mater. Struct.

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This paper reports a new shape-memory-alloy (SMA) micro-positioning stage. The device has been monolithically micro-machined with a single fabrication step. The design comprises a moving stage that is manipulated by six SMA planar springs actuators to generate movements with three degrees of freedom. The overall design is square in shape and has dimensions of 12 mm×12 mm×0.25 mm. Localized thermomechanical training for shape setting of SMA planar springs was performed using electrical current induced heating at restrained condition to individually train each of the six actuators to memorize a predetermined shape. For actuation, each SMA actuator is individually driven using Joule heating induced by an electrical current. The current flow is controlled by an external pulse-width modulation signal. The thermal response and heat distribution were simulated and experimentally verified using infrared imaging. The micro-positioning results indicated maximum stage movements of 1.2 and 1.6 mm along the x-and y-directions, respectively. Rotational movements were also demonstrated with a total range of 20°. The developed micro-positioning device has been successfully used to move a small object for microscopic scanning applications.

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