2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) 2022
DOI: 10.1109/mems51670.2022.9699713
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A Dual Sensing Modes Capacitive Tactile Sensor For Proximity and Tri-Axial Forces Detection

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Cited by 6 publications
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“…However, due to their frequent severe hysteresis and sensitivity to variables like temperature and humidity, capacitive sensors are infrequently employed for macro scale force/torque sensors [29]- [35]. Because viscoelastic material is used in capacitive sensors, the sensors exhibit substantial hysteresis [36]. Figure 1 shows the construction of different types of gauges available to be used for resistance-based construction of force sensor.…”
Section: Force/torque Sensor and Existing Technologymentioning
confidence: 99%
“…However, due to their frequent severe hysteresis and sensitivity to variables like temperature and humidity, capacitive sensors are infrequently employed for macro scale force/torque sensors [29]- [35]. Because viscoelastic material is used in capacitive sensors, the sensors exhibit substantial hysteresis [36]. Figure 1 shows the construction of different types of gauges available to be used for resistance-based construction of force sensor.…”
Section: Force/torque Sensor and Existing Technologymentioning
confidence: 99%