2018
DOI: 10.1177/1077546318793219
|View full text |Cite
|
Sign up to set email alerts
|

A dual-loop tracking control approach to precise nanopositioning

Abstract: Nanopositioners are mechanical devices that can accurately move with a resolution in the nanometre scale. Due to their mechanical construction and the piezoelectric actuators popularly employed in nanopositioners, these devices have severe performance limitations due to resonance, hysteresis and creep. A number of techniques to control nanopositioners, both in open-loop and closed-loop, have been reported in literature. Closed-loop techniques clearly outperform open-loop techniques due to several desirable cha… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2

Citation Types

0
1
0

Year Published

2019
2019
2024
2024

Publication Types

Select...
5
1

Relationship

2
4

Authors

Journals

citations
Cited by 8 publications
(2 citation statements)
references
References 35 publications
(39 reference statements)
0
1
0
Order By: Relevance
“…Due to lack of robustness, high dependency on accurate modeling and low disturbance rejection characteristics, open-loop approaches were discarded in favour of closed-loop approaches [13]. Closed-loop approaches predominantly focussed on a two stage approach of implementing linear damping and tracking controllers in tandem to de-liver acceptable positioning performance [14]. However, most of the reported techniques are based on a simple second-order system model and do not explicitly model the hysteresis; rather depend on the high-gain tracking controller (typically an integrator) to minimize hysteresis-induced positioning errors.…”
Section: Introductionmentioning
confidence: 99%
“…Due to lack of robustness, high dependency on accurate modeling and low disturbance rejection characteristics, open-loop approaches were discarded in favour of closed-loop approaches [13]. Closed-loop approaches predominantly focussed on a two stage approach of implementing linear damping and tracking controllers in tandem to de-liver acceptable positioning performance [14]. However, most of the reported techniques are based on a simple second-order system model and do not explicitly model the hysteresis; rather depend on the high-gain tracking controller (typically an integrator) to minimize hysteresis-induced positioning errors.…”
Section: Introductionmentioning
confidence: 99%
“…After damping control, conventional Proportional Integral (PI) or Integral (I) control algorithms are able to achieve accurate tracking control in nanopositioning applications. There are numerous attempts in the literature to employ a double integral, as reported in [27,28]. However, these control methods increase the order of the system and introduce a phase shift in the tracking control.…”
Section: Introductionmentioning
confidence: 99%