A dome shaped piezoelectric tactile sensor array using controlled inflation technique

Kim, M. S.; Jo, Sung Eun; Kang, Dong Heon; Ahn, Hye Rin; Kim, Y. J.

doi:10.1109/transducers.2013.6627161

Cited by 5 publications

(2 citation statements)

References 6 publications

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“…The sensor also has a good sensitivity of 14.93 pC/N, 14.92 pC/N and 6.62 pC/N in x -, y - and z -direction, respectively. Kim et al (2013) presented a PVDF dome-shaped piezoelectric tactile sensor array based on the air inflation technique. Their sensor has high sensitivity of 8.83 × 10 −3 V/mN and small size of 0.5 × 1.0 mm.…”

Section: Introductionmentioning

confidence: 99%

Design of biomimetic human-skin-like tactile flexible sensor

Lü

Xie

Gao

et al. 2019

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Purpose The hands of intelligent robots perceive external stimuli and respond effectively according to tactile or pressure sensors. However, the traditional tactile and pressure sensors cannot perform human-skin-like intelligent properties of high sensitivity, large measurement range, multi-function and flexibility simultaneously. The purpose of this paper is to present a flexible tactile-pressure sensor based on hyper-elastics polydimethylsiloxane and plate capacitance. Design/methodology/approach With regard to this problem, this paper presents a flexible tactile-pressure sensor based on hyper-elastics PDMS and plate capacitance. The sensor has a size of 10 mm × 10 mm × 1.3 mm and is composed of four upper electrodes, one middle driving electrode and one lower electrode. The authors first analyzed the structure and the tactile-pressure sensing principle of human skin to obtain the design parameters of the sensor. Then they presented the working principle, material selection and mechanical structure design and fabrication process of the sensor. The authors also fabricated several sample devices of the sensor and carried out experiments to establish the relationship between the sensor output and the pressure. Findings The results show that the tactile part of the sensor can measure a range of 0.05-1N/mm2 micro pressure with a sensitivity of 2.93 per cent/N and a linearity of 0.03 per cent. The pressure part of the sensor can measure a range of 1-30N/mm2 pressure with a sensitivity of 0.08 per cent/N and a linearity of 0.07 per cent. Originality/value This paper analyzes the tactile and pressure sensing principles of human skin and develop an intelligent sensitive human-skin-like tactile-pressure sensor for intelligent robot perception systems. The sensor can achieve to imitate the tactile and pressure function simultaneously with a measurement resolution of 0.01 N and a spatial resolution of 2 mm.

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Section: Introductionmentioning

confidence: 99%

Design of biomimetic human-skin-like tactile flexible sensor

Lü

Xie

Gao

et al. 2019

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“…The dome-shaped membrane has been used for various types of applications including flow sensor [1], touch mode sensor [2], tactile sensor [3] and microvalve [4]. The PDMS dome-shaped membrane has been realized using simple fabrication techniques such as casting and molding.…”

Section: Introductionmentioning

confidence: 99%

Fabrication Techniques for PDMS Dome-Shaped Membrane Using Soft Lithography Process

Nawi

Manaf

Arshad

et al. 2014

AMM

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The dome-shaped membrane is very important part of the micro/nano devices. The dome-shaped with the thickness of 150 μm and a radius of 3.2 mm was fabricated using the soft lithography process. The Polydimethylsiloxane (PDMS) was selected as a material because it deformable and suitable to implement as a membrane. Soft lithography is based on pattern transfer using a mold that is patterning the substrate material. In this paper, two techniques were suggested to fabricate the dome-shaped membrane which are reflow technique and stamping technique. The comparison was made for both techniques using a Scanning Electron Microscope (SEM) and it seems the stamping technique has an advantage where the uniform thickness of the dome-shaped membrane can be achieved. The discussion on the temperature effect of a stamping technique shows that the suitable temperature to harden the PDMS is in temperature room where the bubbles can be eliminated under this temperature.

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