A diffraction grating created in diamond substrate by boron ion implantation

Степанов, А. Л.; Нуждин, В. И.; Galyautdinov, M. F.; Kurbatova, N. V.; Валеев, В. Ф.; Vorobev, V. V.; Osin, Yu. N.

doi:10.1134/s1063785017010266

Cited by 7 publications

(4 citation statements)

References 9 publications

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“…The effect has been shown to be suitable for the generation of customized three-dimensional surface patterns by irradiation with a proper mask [8], based on the knowledge accumulated in previous works on the response of single-crystal diamond to irradiation under different conditions [3]. A similar effect has also been seen using low-energy heavy ions and a diffraction optical element has been manufactured using high-dose implantation in diamond of 40 keV boron ions through a surface mask [9].…”

Section: Introductionmentioning

confidence: 84%

Process design for the manufacturing of soft X-ray gratings in single-crystal diamond by high-energy heavy-ion irradiation

et al. 2022

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This paper describes in detail a novel manufacturing process for optical gratings suitable for use in the UV and soft X-ray regimes in a single-crystal diamond substrate based on highly focused swift heavy-ion irradiation. This type of grating is extensively used in light source facilities such as synchrotrons or free electron lasers, with ever-increasing demands in terms of thermal loads, depending on beamline operational parameters and architecture. The process proposed in this paper may be a future alternative to current manufacturing techniques, providing the advantage of being applicable to single-crystal diamond substrates, with their unique properties in terms of heat conductivity and radiation hardness. The paper summarizes the physical principle used for the grating patterns produced by swift heavy-ion irradiation and provides full details for the manufacturing process for a specific grating configuration, inspired in one of the beamlines at the ALBA synchrotron light source, while stressing the most challenging points for a potential implementation. Preliminary proof-of-concept experimental results are presented, showing the practical implementation of the methodology proposed herein.

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Section: Introductionmentioning

confidence: 84%

Process design for the manufacturing of soft X-ray gratings in single-crystal diamond by high-energy heavy-ion irradiation

et al. 2022

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“…diamond by Stepanov et al [68]. Boron ions with an energy of 40 keV were implanted with a high fluence of 1.43 × 10 18 ion/ cm 2 , masked by nickel grid with 40 μm square openings.…”

Section: X-raymentioning

confidence: 99%

“…(a) E-beam patterned dense gratings fabricated a chrome hardmask[66]. (b) Selectively boron-implanted and graphitized diamond diffraction grating[68].…”

mentioning

confidence: 99%

Diamond diffractive optics—recent progress and perspectives

Kiss

Huszka

et al. 2020

Advanced Optical Technologies

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Diamond is an exceptional material that has recently seen a remarkable increase in interest in academic research and engineering since high-quality substrates became commercially available and affordable. Exploiting the high refractive index, hardness, laser-induced damage threshold, thermal conductivity and chemical resistance, an abundance of applications incorporating ever higher-performance diamond devices has seen steady growth. Among these, diffractive optical elements stand out—with progress in fabrication technologies, micro- and nanofabrication techniques have enabled the creation of gratings and diffractive optical elements with outstanding properties. Research activities in this field have further been spurred by the unique property of diamond to be able to host optically active atom scale defects in the crystal lattice. Such color centers allow generation and manipulation of individual photons, which has contributed to accelerated developments in engineering of novel quantum applications in diamond, with diffractive optical elements amidst critical components for larger-scale systems. This review collects recent examples of diffractive optical devices in diamond, and highlights the advances in manufacturing of such devices using micro- and nanofabrication techniques, in contrast to more traditional methods, and avenues to explore diamond diffractive optical elements for emerging and future applications are put in perspective.

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“…We present diffraction gratings with sidewalls along the {100} and {111} planes, following our previous demonstration of this fabrication method to manufacture beamsplitters with trapezoidal profile [34]. Diffraction gratings in diamond have been previously published using directional anisotropic etching, exploitation of mask redeposition [36], boron implantation [37] and for X-ray applications [38]. Compared to these fabrication methods, crystallographic etching allows precise control of angles, produces smooth sidewalls free of ion damage and enables high aspect ratio gratings using commonly available microfabrication equipment.…”

Section: Introductionmentioning

confidence: 99%

High-quality single crystal diamond diffraction gratings fabricated by crystallographic etching

Kiss¹,

Graziosi²,

Toros³

et al. 2019

Opt. Express

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We demonstrate a novel method for fabricating single crystal diamond diffraction gratings based on crystallographic etching that yields high-quality diffraction gratings from commercially available <100> diamond plates. Both V-groove and rectangular gratings were fabricated and characterised using scanning electron microscopy and atomic force microscopy, revealing angles of 57° and 87° depending on the crystal orientation, with mean roughness below R a = 5 nm on the sidewalls. The gratings were also optically characterised, showing good agreement with simulated results. The fabrication method demonstrated in this contribution shows the way for manufacturing high-quality diamond diffractive components that surpass existing devices both in quality and manufacturability.

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A diffraction grating created in diamond substrate by boron ion implantation

Cited by 7 publications

References 9 publications

Process design for the manufacturing of soft X-ray gratings in single-crystal diamond by high-energy heavy-ion irradiation

Process design for the manufacturing of soft X-ray gratings in single-crystal diamond by high-energy heavy-ion irradiation

Diamond diffractive optics—recent progress and perspectives

High-quality single crystal diamond diffraction gratings fabricated by crystallographic etching

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